Ultimate vertical gate-all-around metal–oxide–semiconductor field-effect transistor and its three-dimensional integrated circuits

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2021.106046 ◽

2021 ◽

Vol 134 ◽

pp. 106046

Author(s):

Shujun Ye ◽

Kikuo Yamabe ◽

Tetsuo Endoh

Keyword(s):

Integrated Circuits ◽

Metal Oxide ◽

Field Effect ◽

Field Effect Transistor ◽

Three Dimensional ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Effect Transistor

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Additional-Body Effects in a Self-Aligned Deca-Nanometer Ultrathin-Body and Buried Oxide Silicon-on-Insulator Metal–Oxide–Semiconductor Field-Effect Transistor: A Three-Dimensional Simulation Study

Japanese Journal of Applied Physics ◽

10.7567/jjap.50.110210 ◽

2011 ◽

Vol 50 (11R) ◽

pp. 110210 ◽

Cited By ~ 1

Author(s):

Jyi-Tsong Lin ◽

Yi-Chuen Eng ◽

Cheng-Hsin Chen ◽

Yi-Hsuan Fan

Keyword(s):

Metal Oxide ◽

Simulation Study ◽

Field Effect ◽

Field Effect Transistor ◽

Three Dimensional ◽

Metal Oxide Semiconductor ◽

Silicon On Insulator ◽

Oxide Semiconductor ◽

Effect Transistor ◽

Dimensional Simulation

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Original shaped nanowire metal-oxide-semiconductor field-effect transistor with enhanced current characteristics based on three-dimensional modeling

Journal of Applied Physics ◽

10.1063/1.3204550 ◽

2009 ◽

Vol 106 (5) ◽

pp. 053711 ◽

Cited By ~ 3

Author(s):

N. Pons ◽

N. Cavassilas ◽

F. Michelini ◽

L. Raymond ◽

M. Bescond

Keyword(s):

Metal Oxide ◽

Field Effect ◽

Field Effect Transistor ◽

Three Dimensional ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Three Dimensional Modeling ◽

Dimensional Modeling ◽

Effect Transistor ◽

Current Characteristics

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Complete three-dimensional reduced surface field super junction lateral double-diffused metal-oxide-semiconductor field-effect transistor with semi-insulating poly silicon

Acta Physica Sinica ◽

10.7498/aps.64.187303 ◽

2015 ◽

Vol 64 (18) ◽

pp. 187303

Author(s):

Cao Zhen ◽

Duan Bao-Xing ◽

Yuan Xiao-Ning ◽

Yang Yin-Tang

Keyword(s):

Metal Oxide ◽

Field Effect ◽

Field Effect Transistor ◽

Three Dimensional ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Poly Silicon ◽

Surface Field ◽

Effect Transistor ◽

Reduced Surface

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Circuit Simulation Of Three-Dimensional Metal Oxide Semiconductor Field Effect Transistor (MOSFET) Device Structures In Beam-Recrystallized Polysilicon Films

10.1117/12.934950 ◽

1983 ◽

Cited By ~ 1

Author(s):

James F. Gibbons ◽

Martin D. Giles ◽

Kwing F. Lee ◽

James T. Walker

Keyword(s):

Metal Oxide ◽

Field Effect ◽

Field Effect Transistor ◽

Circuit Simulation ◽

Three Dimensional ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Device Structures ◽

Polysilicon Films ◽

Effect Transistor

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Narrow Metal-Filled Trench as a Source/Drain Contact for Three-Dimensional Metal–Oxide–Semiconductor Field Effect Transistor

Japanese Journal of Applied Physics ◽

10.1143/jjap.48.04c032 ◽

2009 ◽

Vol 48 (4) ◽

pp. 04C032 ◽

Cited By ~ 1

Author(s):

Heon-Bok Lee ◽

Shi-Hyun Ahn ◽

Jung-Hee Lee ◽

Sung-Ho Hahm

Keyword(s):

Metal Oxide ◽

Field Effect ◽

Field Effect Transistor ◽

Three Dimensional ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Effect Transistor

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Additional-Body Effects in a Self-Aligned Deca-Nanometer Ultrathin-Body and Buried Oxide Silicon-on-Insulator Metal–Oxide–Semiconductor Field-Effect Transistor: A Three-Dimensional Simulation Study

Japanese Journal of Applied Physics ◽

10.1143/jjap.50.110210 ◽

2011 ◽

Vol 50 ◽

pp. 110210

Author(s):

Jyi-Tsong Lin ◽

Yi-Chuen Eng ◽

Cheng-Hsin Chen ◽

Yi-Hsuan Fan

Keyword(s):

Metal Oxide ◽

Simulation Study ◽

Field Effect ◽

Field Effect Transistor ◽

Three Dimensional ◽

Metal Oxide Semiconductor ◽

Silicon On Insulator ◽

Oxide Semiconductor ◽

Effect Transistor ◽

Dimensional Simulation

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Monolayer segregation of As atoms at the interface between gate oxide and Si substrate in a metal-oxide-semiconductor field effect transistor by three-dimensional atom-probe technique

Applied Physics Letters ◽

10.1063/1.2891081 ◽

2008 ◽

Vol 92 (10) ◽

pp. 103506 ◽

Cited By ~ 25

Author(s):

Koji Inoue ◽

Fumiko Yano ◽

Akio Nishida ◽

Takaaki Tsunomura ◽

Takeshi Toyama ◽

...

Keyword(s):

Metal Oxide ◽

Field Effect ◽

Field Effect Transistor ◽

Three Dimensional ◽

Gate Oxide ◽

Atom Probe ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Si Substrate ◽

Effect Transistor

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A technique to measure spin-dependent trapping events at the metal–oxide–semiconductor field-effect transistor interface: Near zero field spin-dependent charge pumping

Journal of Applied Physics ◽

10.1063/5.0027214 ◽

2020 ◽

Vol 128 (24) ◽

pp. 244501

Author(s):

M. A. Anders ◽

P. M. Lenahan ◽

N. J. Harmon ◽

M. E. Flatté

Keyword(s):

Metal Oxide ◽

Field Effect ◽

Field Effect Transistor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Zero Field ◽

Charge Pumping ◽

Effect Transistor

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Effects of Hafnium Oxide on Surface Potential and Drain Current Models for Subthreshold Short Channel Metal–Oxide–Semiconductor-Field-Effect-Transistor

Transactions on Electrical and Electronic Materials ◽

10.1007/s42341-020-00181-4 ◽

2020 ◽

Vol 21 (3) ◽

pp. 339-347 ◽

Cited By ~ 3

Author(s):

N. P. Maity ◽

Reshmi Maity ◽

Subir Dutta ◽

Subhasish Deb ◽

K. Girija Sravani ◽

...

Keyword(s):

Metal Oxide ◽

Surface Potential ◽

Hafnium Oxide ◽

Field Effect ◽

Field Effect Transistor ◽

Drain Current ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Short Channel ◽

Effect Transistor

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High responsivity in integrated optically controlled metal-oxide semiconductor field-effect transistor using directly bonded SiO2-InP

IEEE Photonics Technology Letters ◽

10.1109/68.605530 ◽

1997 ◽

Vol 9 (8) ◽

pp. 1143-1145 ◽

Cited By ~ 10

Author(s):

T. Yamagata ◽

K. Shimomura

Keyword(s):

Metal Oxide ◽

Field Effect ◽

Field Effect Transistor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

High Responsivity ◽

Effect Transistor

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