CMOS compatible pyroelectric materials for infrared detectors

2022 ◽  
Vol 140 ◽  
pp. 106375
Author(s):  
Ranu ◽  
Uthra B ◽  
Rahul Sinha ◽  
Pankaj B. Agarwal
Keyword(s):  
Infrared Detectors ◽  
Cmos Compatible

CMOS compatible MEMS pyroelectric infrared detectors: from AlN to ScAlN

2021 ◽  
Author(s):  
Doris K. T. Ng ◽  
Chong Pei Ho ◽  
Tantan Zhang ◽  
Linfang Xu ◽  
Li Yan Siow ◽  
...  
Keyword(s):  
Infrared Detectors ◽  
Cmos Compatible

Pressure Sensor Monolithically Integrating MEMS and CMOS-LSI with CMOS Compatible “Back-end-of-line MEMS processes”

2010 ◽  
Vol 130 (5) ◽  
pp. 170-175
Author(s):  
Tsukasa Fujimori ◽  
Hideaki Takano ◽  
Yuko Hanaoka ◽  
Yasushi Goto
Keyword(s):  
Pressure Sensor ◽  
Cmos Compatible

Antenna Structures for Optical Coupling in Quantum-Well Infrared Detectors

1998 ◽  
Author(s):  
William A. Beck ◽  
Mark S. Mirotznik ◽  
Thomas S. Faska
Keyword(s):  
Quantum Well ◽  
Infrared Detectors ◽  
Optical Coupling

A CMOS-compatible high-speed silicon lateral trench photodetector

2002 ◽  
Author(s):  
M. Yang ◽  
K. Rim ◽  
D. Rogers ◽  
J. Schaub ◽  
J. Welser ◽  
...  
Keyword(s):  
High Speed ◽  
Cmos Compatible

scholarly journals NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detector

2021 ◽  
pp. 130437
Author(s):  
Doris Keh Ting Ng ◽  
Chong Pei Ho ◽  
Linfang Xu ◽  
Weiguo Chen ◽  
Yuan Hsing Fu ◽  
...  
Keyword(s):  
Gas Sensing ◽  
Pyroelectric Detector ◽  
Co2 Gas ◽  
Cmos Compatible
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