Surface corrosion inhibition mechanism of sarcosine as a green novel inhibitor on a novel barrier layer material of cobalt in copper film CMP for GLSI
2022 ◽
Vol 140
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pp. 106402
Keyword(s):
2020 ◽
Vol 19
(02)
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pp. 2050010
2020 ◽
Vol 22
(6)
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pp. 3329-3344
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2011 ◽
Vol 53
(12)
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pp. 4033-4043
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2019 ◽
Vol 55
(5)
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pp. 973-985
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2021 ◽
Vol 268
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pp. 121105
2012 ◽
Vol 16
(4)
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pp. 559-569
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