Computer simulation of high-energy-beam irradiation of single-crystalline silicon

Author(s):  
Y. Sasajima ◽  
T. Akabane ◽  
T. Nakazawa ◽  
A. Iwase
2013 ◽  
Vol 38 (3) ◽  
pp. 497-502 ◽  
Author(s):  
Y. Sasajima ◽  
H. Onuki ◽  
N. Ishikawa ◽  
A. Iwase

2006 ◽  
Vol 315-316 ◽  
pp. 159-163
Author(s):  
Yan Shen Wang ◽  
Ying Chun Liang ◽  
Shen Dong ◽  
Wei Wei An ◽  
Bo Wang

High-energy femtosecond laser pulses were utilized to ablate single-crystalline silicon wafer. Collateral damage areas around the ablation zone can be observed in microscope. The morphology in such areas changes gradually. The microscopic morphology and nanomechanical properties of the pre-polished back surface were measured by AFM and Hysitron TriboIndenter respectively. The topography and roughness in the ablated, metamorphic and unaffected zone are almost equal. Yet the elastic ratio and hardness on the back surface vary gradually with indent positions, which coincide with the gradual morphological changes in the metamorphic zone on the front surface. Such regular changes in nanomechanical properties, to some extent, reflect the distribution of collateral damages near the ablated zone on the back surface. And they also testify the occurrence of the ill effects that go against micromachining during high-energy femtosecond laser irradiation.


2021 ◽  
Vol 7 (1) ◽  
pp. 010306
Author(s):  
Аngelina Kosheleva ◽  
Еgor Bobkov

The current approaches to cancer treatment, including surgery and high-energy beam irradiation, do not always give satisfactory results for a number of oncological neoplasms. One of the promising areas in oncology is the use of nanoparticles selectively heated by external action as agents for hyperthermia of some types of tumors. In this work, we performed selective heating of suspensions of silicon nanoparticles using a device for electromagnetic high-frequency therapy (UHF-60).


2013 ◽  
Vol 58 (2) ◽  
pp. 142-150 ◽  
Author(s):  
A.V. Sachenko ◽  
◽  
V.P. Kostylev ◽  
V.G. Litovchenko ◽  
V.G. Popov ◽  
...  

2012 ◽  
Vol 7 (04) ◽  
pp. P04002-P04002 ◽  
Author(s):  
E Bagli ◽  
L Bandiera ◽  
P Dalpiaz ◽  
V Guidi ◽  
A Mazzolari ◽  
...  

1955 ◽  
Vol 26 (2) ◽  
pp. 229-231 ◽  
Author(s):  
G. W. Tautfest ◽  
H. R. Fechter

Sign in / Sign up

Export Citation Format

Share Document