MARLOWE Simulation of High Energy Ions into Single Crystalline Silicon Substrates

2018 ◽  
Author(s):  
Haruka Sasaki ◽  
Yoji Kawasaki ◽  
Shiro Ninomiya ◽  
Michiro Sugitani
Keyword(s):  
Crystalline Silicon ◽  
High Energy ◽  
Silicon Substrates ◽  
Single Crystalline Silicon ◽  
Single Crystalline ◽  
High Energy Ions

Nanomechanical Properties of Single-Crystalline Silicon Wafer Irradiated by High-Energy Femtosecond Laser Pulses

2006 ◽  
Vol 315-316 ◽  
pp. 159-163
Author(s):  
Yan Shen Wang ◽  
Ying Chun Liang ◽  
Shen Dong ◽  
Wei Wei An ◽  
Bo Wang
Keyword(s):  
Femtosecond Laser ◽  
Silicon Wafer ◽  
Crystalline Silicon ◽  
Laser Pulses ◽  
High Energy ◽  
Femtosecond Laser Pulses ◽  
Back Surface ◽  
Single Crystalline Silicon ◽  
Single Crystalline ◽  
Nanomechanical Properties

High-energy femtosecond laser pulses were utilized to ablate single-crystalline silicon wafer. Collateral damage areas around the ablation zone can be observed in microscope. The morphology in such areas changes gradually. The microscopic morphology and nanomechanical properties of the pre-polished back surface were measured by AFM and Hysitron TriboIndenter respectively. The topography and roughness in the ablated, metamorphic and unaffected zone are almost equal. Yet the elastic ratio and hardness on the back surface vary gradually with indent positions, which coincide with the gradual morphological changes in the metamorphic zone on the front surface. Such regular changes in nanomechanical properties, to some extent, reflect the distribution of collateral damages near the ablated zone on the back surface. And they also testify the occurrence of the ill effects that go against micromachining during high-energy femtosecond laser irradiation.

Recombination Characteristics of Single-Crystalline Silicon Wafers with a Damaged Near-Surface Layer

2013 ◽  
Vol 58 (2) ◽  
pp. 142-150 ◽  
Author(s):  
A.V. Sachenko ◽  
◽  
V.P. Kostylev ◽  
V.G. Litovchenko ◽  
V.G. Popov ◽  
...  
Keyword(s):  
Surface Layer ◽  
Crystalline Silicon ◽  
Silicon Wafers ◽  
Single Crystalline Silicon ◽  
Near Surface ◽  
Single Crystalline
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