Influence of Ne sputtering gas on structure and properties of diamond-like carbon films deposited by pulsed-magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2017.02.009 ◽

2017 ◽

Vol 625 ◽

pp. 163-167 ◽

Author(s):

Wei Dai ◽

Xiang Gao ◽

Qimin Wang ◽

Aijiao Xu

Keyword(s):

Magnetron Sputtering ◽

Carbon Films ◽

Diamond Like Carbon ◽

Structure And Properties ◽

Pulsed Magnetron

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Morphology, structure and properties of diamond-like carbon films prepared by spin coating and RF magnetron sputtering

Materials Technology ◽

10.1080/10667857.2016.1191149 ◽

2016 ◽

Vol 31 (sup1) ◽

pp. 10-16 ◽

Author(s):

Ho Chang ◽

Yo-Shin Lai

Keyword(s):

Magnetron Sputtering ◽

Spin Coating ◽

Rf Magnetron Sputtering ◽

Carbon Films ◽

Diamond Like Carbon ◽

Structure And Properties

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Surface treatment of diamond-like carbon films by reactive Ar/CF4 high-power pulsed magnetron sputtering plasmas

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2015.03.020 ◽

2015 ◽

Vol 365 ◽

pp. 155-158 ◽

Author(s):

Takashi Kimura ◽

Ryotaro Nishimura ◽

Kingo Azuma ◽

Setsuo Nakao ◽

Tsutomu Sonoda ◽

...

Keyword(s):

Magnetron Sputtering ◽

Surface Treatment ◽

Carbon Films ◽

Diamond Like Carbon ◽

Pulsed Magnetron

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Influence of deposition pressure on the structure and properties of fluorinated diamond-like carbon films prepared by RF reactive magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2005.03.023 ◽

2006 ◽

Vol 200 (12-13) ◽

pp. 3682-3686 ◽

Author(s):

Meifu Jiang ◽

Zhaoyuan Ning

Keyword(s):

Magnetron Sputtering ◽

Carbon Films ◽

Reactive Magnetron Sputtering ◽

Diamond Like Carbon ◽

Reactive Magnetron ◽

Structure And Properties ◽

Deposition Pressure

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Optical properties of diamond like carbon films containing copper, grown by high power pulsed magnetron sputtering and direct current magnetron sputtering: Structure and composition effects

Thin Solid Films ◽

10.1016/j.tsf.2014.11.045 ◽

2015 ◽

Vol 581 ◽

pp. 48-53 ◽

Author(s):

Š. Meškinis ◽

A. Čiegis ◽

A. Vasiliauskas ◽

K. Šlapikas ◽

T. Tamulevičius ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Direct Current ◽

Carbon Films ◽

Diamond Like Carbon ◽

Composition Effects ◽

Direct Current Magnetron Sputtering ◽

Pulsed Magnetron

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Preparation of Titanium-Doped Diamond-Like Carbon Films With Electrical Conductivity Using High Power Pulsed Magnetron Sputtering System With Bipolar Pulse Voltage Source for Substrate

IEEE Transactions on Plasma Science ◽

10.1109/tps.2016.2587750 ◽

2016 ◽

Vol 44 (12) ◽

pp. 3083-3090 ◽

Author(s):

Takashi Kimura ◽

Hikaru Kamata ◽

Setsuo Nakao ◽

Kingo Azuma

Keyword(s):

Electrical Conductivity ◽

Magnetron Sputtering ◽

Carbon Films ◽

Pulse Voltage ◽

Voltage Source ◽

Diamond Like Carbon ◽

Bipolar Pulse ◽

Sputtering System ◽

Pulsed Magnetron

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Conductive diamond-like carbon films prepared by high power pulsed magnetron sputtering with bipolar type plasma based ion implantation system

Diamond and Related Materials ◽

10.1016/j.diamond.2017.06.011 ◽

2017 ◽

Vol 77 ◽

pp. 122-130 ◽

Author(s):

Setsuo Nakao ◽

Takashi Kimura ◽

Taku Suyama ◽

Kingo Azuma

Keyword(s):

Ion Implantation ◽

Magnetron Sputtering ◽

Carbon Films ◽

Diamond Like Carbon ◽

Bipolar Type ◽

Pulsed Magnetron

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Investigation of diamond-like-carbon films prepared by unbalanced magnetron sputtering

Acta Physica Sinica ◽

10.7498/aps.54.4944 ◽

2005 ◽

Vol 54 (10) ◽

pp. 4944

Author(s):

Yang Wu-Bao ◽

Fan Song-Hua ◽

Zhang Gu-Ling ◽

Ma Pei-Ning ◽

Zhang Shou-Zhong ◽

...

Keyword(s):

Magnetron Sputtering ◽

Carbon Films ◽

Diamond Like Carbon ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Structural and mechanical properties of diamond-like carbon films deposited by direct current magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1575231 ◽

2003 ◽

Vol 21 (4) ◽

pp. 851-859 ◽

Author(s):

E. Broitman ◽

N. Hellgren ◽

Zs. Czigány ◽

R. D. Twesten ◽

J. Luning ◽

...

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Direct Current ◽

Carbon Films ◽

Diamond Like Carbon ◽

Direct Current Magnetron Sputtering

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Effects of pulse bias on structure and properties of silicon/nitrogen-incorporated diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition

Applied Surface Science ◽

10.1016/j.apsusc.2012.10.082 ◽

2013 ◽

Vol 264 ◽

pp. 625-632 ◽

Author(s):

Hideki Nakazawa ◽

Soushi Miura ◽

Ryosuke Kamata ◽

Saori Okuno ◽

Maki Suemitsu ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Carbon Films ◽

Diamond Like Carbon ◽

Structure And Properties

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Structure and Properties of Ta–Si–N Coatings Produced by Pulsed Magnetron Sputtering

Russian Journal of Non-Ferrous Metals ◽

10.3103/s1067821221050151 ◽

2021 ◽

Vol 62 (5) ◽

pp. 611-617

Author(s):

A. D. Sytchenko ◽

E. A. Levashov ◽

Ph. V. Kiryukhantsev-Korneev

Keyword(s):

Magnetron Sputtering ◽

Structure And Properties ◽

Pulsed Magnetron

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