A novel quartz-enhanced photoacoustic spectroscopy (QEPAS) sensor based on a micro quartz tuning fork (QTF) is reported. As a photoacoustic transducer, a novel micro QTF was 3.7 times smaller than the usually used standard QTF, resulting in a gas sampling volume of ~0.1 mm3. As a proof of concept, water vapor in the air was detected by using 1.39 μm distributed feedback (DFB) laser. A detailed analysis of the performance of a QEPAS sensor based on the micro QTF was performed by detecting atmosphere H2O. The laser focus position and the laser modulation depth were optimized to improve the QEPAS excitation efficiency. A pair of acoustic micro resonators (AmRs) was assembled with the micro QTF in an on-beam configuration to enhance the photoacoustic signal. The AmRs geometry was optimized to amplify the acoustic resonance. With a 1 s integration time, a normalized noise equivalent absorption coefficient (NNEA) of 1.97 × 10−8 W·cm−1·Hz−1/2 was achieved when detecting H2O at less than 1 atm.
Ppb-level gas detection using on-beam quartz-enhanced photoacoustic spectroscopy based on a 28 kHz tuning fork
