Development of V-Shaped Beam on the Shock Resistance and Driving Frequency of Micro Quartz Tuning Forks Resonant Gyroscope

The application of gyroscopes in harsh environments has always been a hot topic. As a high-quality material for manufacturing gyroscopes, quartz crystals need to be designed and optimized to meet the normal operation of gyroscopes in harsh environments. The Micro Electronics Mechanical System(MEMS) quartz tuning forks resonant gyroscope is one of the quartz gyroscopes. The elastic structure (V-shaped beam) between the anchor support point and tuning forks plays a vital role in the MEMS quartz tuning forks resonant gyroscope. This structure determines the natural frequency of the gyroscope, and more importantly, determines the shock resistance of the gyroscope structure. In this article, the MEMS quartz tuning forks gyroscope with different V-shaped beam thicknesses are simulated and analyzed by finite element analysis simulation software. After the modal analysis and shock simulation (the half-cycle sine shock pulse with amplitude of 1500 g (g is the acceleration of gravity) and duration of 2 ms in the six shock directions), the results show that when the beam thickness is 80 μm, the maximum stress is 94.721 MPa, which is less than the failure stress of quartz crystal. The gyroscope’s shock resistance is verified through shock testing.

A Hydrodynamic Model for Measuring Fluid Density and Viscosity by Using Quartz Tuning Forks

A hydrodynamic model of using quartz tuning forks (QTFs) for density and viscosity sensing, by measuring the resonance frequency and quality factor, has been established based on the cantilever beam theory applied to the atomic force microscope (AFM). Two examples are presented to verify the usability of this model. Then, the Sobol index method is chosen for explaining quantitatively how the resonance frequency and quality factor of the QTFs are affected by the fluid density and viscosity, respectively. The results show that the relative mean square error in viscosity of the eight solutions evaluated by the hydrodynamic model is reduced by an order of magnitude comparing with Butterworth–Van Dyke equivalent circuit method. When the measured resonance frequency and quality factor of the QTFs vary from 25,800–26,100 Hz and 28–41, the sensitivities of the quality factor affected by the fluid density increase. This model provides an idea for improving the accuracy of fluid component recognition in real time, and lays a foundation for the application of miniaturized and cost-effective downhole fluid density and viscosity sensors.