Fabrication and drive test of pneumatic PDMS micro pump

2007 ◽  
Vol 135 (2) ◽  
pp. 849-856 ◽  
Author(s):  
Ok Chan Jeong ◽  
Satoshi Konishi
Keyword(s):  
2020 ◽  
Vol 140 (3) ◽  
pp. 65-69
Author(s):  
Yoshinori Akagi ◽  
Daihei Sugita ◽  
Kazuki Yamamoto

2016 ◽  
Vol 2 (1) ◽  
pp. 71-75 ◽  
Author(s):  
Mathias Busek ◽  
Stefan Grünzner ◽  
Tobias Steege ◽  
Udo Klotzbach ◽  
Frank Sonntag

AbstractIn this work a microfluidic cell cultivation device for perfused hypoxia assays as well as a suitable controlling unit are presented. The device features active components like pumps for fluid actuation and valves for fluid direction as well as an oxygenator element to ensure a sufficient oxygen transfer. It consists of several individually structured layers which can be tailored specifically to the intended purpose. Because of its clearness, its mechanical strength and chemical resistance as well as its well-known biocompatibility polycarbonate was chosen to form the fluidic layers by thermal diffusion bonding. Several oxygen sensing spots are integrated into the device and monitored with fluorescence lifetime detection. Furthermore an oxygen regulator module is implemented into the controlling unit which is able to mix different process gases to achieve a controlled oxygenation. First experiments show that oxygenation/deoxygenation of the system is completed within several minutes when pure nitrogen or air is applied to the oxygenator. Lastly the oxygen input by the pneumatically driven micro pump was quantified by measuring the oxygen content before and after the oxygenator.


2018 ◽  
Vol 7 (2.21) ◽  
pp. 66 ◽  
Author(s):  
R Roopa ◽  
P Navin Karanth ◽  
S M. Kulkarni

This study reports the performance of piezo actuated compliant flexure diaphragm for micropump and MEMS application. To achieve the high performance of diaphragm at the low operating voltage compliant flexure diaphragm design is introduced. Very limited work has done on the diaphragms of micropump. Large numbers of mechanical micropumps have used plane diaphragms. The central deflection of diaphragm plays an important role in defining the micropump performance. The flow rate of mechanical type micropump strongly depends on the central deflection of diaphragm. In this paper compliant flexure diaphragms are designed for micropump to achieve higher deflection at lower operating voltage. Finite element analysis of compliant flexure diaphragm with single layer PVDF (Polyvinylidene fluoride) actuator is simulated in COMSOL. Compliant flexure diaphragms with a different number of flexures are analyzed. The central deflection of compliant flexure diaphragms is measured for driving voltages of 90V to 140V in 10 steps. The deflection of the compliant flexure diaphragm mainly depends on flexure width and length, the number of flexures in the diaphragm, PVDF thickness, diaphragm thickness and driving voltage. Use of compliant flexure diaphragm for micropump will reduce the mass and driving voltage of micropump. An attempt is made to compare the results of compliant flexure diaphragms with plane diaphragms. From the experimental results it is noticed that the compliant flexure diaphragm deflection is twice that of the plane diaphragm at same driving voltage. Deflection of three flexure and four flexure compliant diaphragms is 10.5µm and 11.5µm respectively at 140V.  


Nature ◽  
2014 ◽  
Vol 507 (7492) ◽  
pp. 277-277
Keyword(s):  

Author(s):  
Daisuke HIRAMATSU ◽  
Masako YAMADA ◽  
Keisuke MORISHIMA ◽  
Yuji FURUKAWA
Keyword(s):  

2014 ◽  
Vol 609-610 ◽  
pp. 837-841
Author(s):  
Gang Li ◽  
Lei Li ◽  
Xiao Feng Zhao ◽  
Dian Zhong Wen ◽  
Yang Yu

This paper designs a micro-pump silicon diaphragm vibration pickup sensor. In this newsensor which is based on piezoresistive effect, four MOSFETs with nc-Si/c-Si heterojunction drainand source are manufactured on the surface of silicon wafer by using the technique of CMOS andPECVD, at edge of <100> orientation of the N-type silicon diaphragm rectangle, and using MEMStechnology, the back of the four MOSFETs device silicon substrate processed into silicon cup, whichconstitutes the vibration pickup sensor. The micro-pump silicon diaphragm vibration pickup sensornot only has all the advantages of conventional force sensitive resistance vibration pickup sensor, butalso has the advantages of small temperature drift, high detection precision, and it can satisfy themicro-pump silicon diaphragm vibration requirements.


Author(s):  
S Becker ◽  
T Xu ◽  
F Ilchmann ◽  
J Eisler ◽  
B Wolf

This paper presents a concept for an implantable micro-pump based on hydrogen- generating gas cells. The gas-generating cell is separated from the drug reservoir by an expandable latex membrane. The system offers linear drug delivery with flowrates ranging from 8 nl/s to 2 μl/s and a total delivery volume of up to 160 ml. Drugs can be dispensed over a wide backpressure range. The device is scalable based on the size of the gas-producing cell and requires no external energy source. Possible fields of application include in vivo local drug delivery for chemotherapy, diabetes, and pain management.


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