A pT/√Hz sensitivity ac magnetic field sensor based on magnetoelectric composites using low-loss piezoelectric single crystals

2017 ◽  
Vol 260 ◽  
pp. 206-211 ◽  
Author(s):  
Venkateswarlu Annapureddy ◽  
Haribabu Palneedi ◽  
Woon-Ha Yoon ◽  
Dong-Soo Park ◽  
Jong-Jin Choi ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Single Crystals ◽  
Magnetic Field Sensor ◽  
Low Loss ◽  
Magnetoelectric Composites ◽  
Ac Magnetic Field ◽  
Field Sensor

A screen printed and flexible piezoelectric-based AC magnetic field sensor

2017 ◽  
Vol 268 ◽  
pp. 1-8 ◽  
Author(s):  
Amer Abdulmahdi Chlaihawi ◽  
Sepehr Emamian ◽  
Binu Baby Narakathu ◽  
Mohammed Mohammed Ali ◽  
Dinesh Maddipatla ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Magnetic Field Sensor ◽  
Ac Magnetic Field ◽  
Field Sensor ◽  
Screen Printed

Micro Magnetic Field Sensor Based On Terfenol-D/PZT/Terfenol-D Magnetoelectric Composites

2011 ◽  
Vol 483 ◽  
pp. 190-194 ◽  
Author(s):  
Yang Zheng ◽  
Dan Xie ◽  
Jing Ma ◽  
Tian Ling Ren ◽  
Li Tian Liu
Keyword(s):  
Magnetic Field ◽  
Root Mean Square ◽  
Magnetic Measurement ◽  
Magnetic Sensor ◽  
Magnetic Field Sensor ◽  
Mean Square ◽  
Magnetoelectric Composites ◽  
New Type ◽  
Field Sensor

A new type of magnetic sensor based on magnetoelectric(ME) composites has been designed and fabricated. The ME composites has a Terfenol-D/PZT/Terfenol-D structure and its ME coefficient is 0.36 V/cm Oe at room temperture. The sensor has AC magnetic measurement ranges from 0.02 Oe to 12 Oe, reaches a sensitivity of 5×10-3 Oe and has a flat response within 15 kHz. The sensor is equipped with a pre-amplifier and an Root Mean Square(RMS) value convertor.

Highly sensitive wafer-level packaged MEMS magnetic field sensor based on magnetoelectric composites

2013 ◽  
Vol 189 ◽  
pp. 321-327 ◽  
Author(s):  
S. Marauska ◽  
R. Jahns ◽  
C. Kirchhof ◽  
M. Claus ◽  
E. Quandt ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Magnetic Field Sensor ◽  
Wafer Level ◽  
Magnetoelectric Composites ◽  
Highly Sensitive ◽  
Field Sensor

Exchange biased magnetoelectric composites for magnetic field sensor application by frequency conversion

2015 ◽  
Vol 117 (17) ◽  
pp. 17B513 ◽  
Author(s):  
V. Röbisch ◽  
E. Yarar ◽  
N. O. Urs ◽  
I. Teliban ◽  
R. Knöchel ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Frequency Conversion ◽  
Magnetic Field Sensor ◽  
Magnetoelectric Composites ◽  
Sensor Application ◽  
Field Sensor

Magnetooptical properties of cerium-substituted yttrium iron garnet single crystals for magnetic-field sensor

2003 ◽  
Vol 105 (3) ◽  
pp. 293-296 ◽  
Author(s):  
Sadao Higuchi ◽  
Yasunori Furukawa ◽  
Shunji Takekawa ◽  
Osamu Kamada ◽  
Kenji Kitamura ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Single Crystals ◽  
Yttrium Iron Garnet ◽  
Magnetic Field Sensor ◽  
Yttrium Iron ◽  
Field Sensor ◽  
Iron Garnet

scholarly journals A Novel Three-Axial Magnetic-Piezoelectric MEMS AC Magnetic Field Sensor

Micromachines ◽  
2019 ◽  
Vol 10 (10) ◽  
pp. 710
Author(s):  
Po-Chen Yeh ◽  
Hao Duan ◽  
Tien-Kan Chung
Keyword(s):  
Magnetic Field ◽  
Thin Film ◽  
Magnetic Fields ◽  
Thick Film ◽  
Microelectromechanical Systems ◽  
Magnetic Field Sensor ◽  
Sensing Element ◽  
Ac Magnetic Field ◽  
Pzt Thin Film ◽  
Field Sensor

We report a novel three-axial magnetic-piezoelectric microelectromechanical systems (MEMS) magnetic field sensor. The sensor mainly consists of two sensing elements. Each of the sensing elements consists of a magnetic Ni thick film, a Pt/Ti top electrode, a piezoelectric lead zirconate titanate (PZT) thin film, a Pt/Ti bottom electrode, a SiO2 insulation layer, and a moveable Si MEMS diaphragm. When the sensor is subjected to an AC magnetic field oscillating at 7.5 kHz, a magnetic force interaction between the magnetic field and Ni thick film is produced. Subsequently, the force deforms and deflects the diaphragms as well as the PZT thin film deposited on the diaphragms. The deformation and deflection produce corresponding voltage outputs due to the piezoelectric effect. By analyzing the voltage outputs through our criterion, we can obtain details of the unknown magnetic fields to which the sensor is subjected. This achieves sensing of three-axial magnetic fields. The experimental results show that the sensor is able to sense three-axial magnetic fields ranging from 1 to 20 Oe, with X-axial, Y-axial, and Z-axial sensitivities of 0.156 mVrms/Oe, 0.156 mVrms/Oe, and 0.035 mVrms/Oe, respectively, for sensing element A and 0.033 mVrms/Oe, 0.044 mVrms/Oe, and 0.130 mVrms/Oe, respectively, for sensing element B.

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