Finger flexion power generators made of piezoelectric lead zirconate titanate thin films on stainless steel foils

2021 ◽  
Vol 322 ◽  
pp. 112617
Author(s):  
Ryo Harada ◽  
Naoya Iwamoto ◽  
Sang-Hyo Kweon ◽  
Toshihito Umegaki ◽  
Isaku Kanno
Keyword(s):  
Thin Films ◽  
Stainless Steel ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Power Generators ◽  
Zirconate Titanate ◽  
Finger Flexion ◽  
Piezoelectric Lead Zirconate Titanate ◽  
Stainless Steel Foils ◽  
Steel Foils

Micromachined Silicon Disk Resonator Transduced by Piezoelectric Lead Zirconate Titanate Thin Films

2010 ◽  
Vol 49 (6) ◽  
pp. 06GN17 ◽  
Author(s):  
Jian Lu ◽  
Tadatomo Suga ◽  
Yi Zhang ◽  
Toshihiro Itoh ◽  
Ryutaro Maeda ◽  
...  
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Disk Resonator ◽  
Zirconate Titanate ◽  
Piezoelectric Lead Zirconate Titanate

In situcell detection using piezoelectric lead zirconate titanate-stainless steel cantilevers

2003 ◽  
Vol 93 (1) ◽  
pp. 619-625 ◽  
Author(s):  
Jeong W. Yi ◽  
Wan Y. Shih ◽  
R. Mutharasan ◽  
Wei-Heng Shih
Keyword(s):  
Stainless Steel ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Zirconate Titanate ◽  
Piezoelectric Lead Zirconate Titanate

Improvement of Ferroelectric Properties of Lead Zirconate Titanate Thin Films by Ion-substitution using Rare-earth Cations

2004 ◽  
Vol 830 ◽  
Author(s):  
Hiroshi Nakaki ◽  
Hiroshi Uchida ◽  
Shoji Okamoto ◽  
Shintaro Yokoyama ◽  
Hiroshi Funakubo ◽  
...  
Keyword(s):  
Thin Films ◽  
Rare Earth ◽  
Lead Zirconate Titanate ◽  
Ferroelectric Property ◽  
Ferroelectric Properties ◽  
Lead Zirconate ◽  
Crystal Anisotropy ◽  
Pzt Film ◽  
Zirconate Titanate ◽  
Ion Substitution

ABSTRACTRare-earth-substituted tetragonal lead zirconate titanate thin films were synthesized for improving the ferroelectric property of conventional lead zirconate titanate. Thin films of Pb1.00REx (Zr0.40Ti0.60)1-(3x /4)O3 (x = 0.02, RE = Y, Dy, Er and Yb) were deposited on (111)Pt/Ti/SiO2/(100)Si substrates by a chemical solution deposition (CSD). B-site substitution using rare-earth cations described above enhanced the crystal anisotropy, i.e., ratio of PZT lattice parameters c/a. Remanent polarization (Pr) of PZT film was enhanced by Y3+-, Dy3+- and Er3+-substitution from 20 μC/cm2 up to 26, 25 and 26 μC/cm2 respectively, while ion substitution using Yb3+ degraded the Pr value down to 16 μC/cm2. These films had similar coercive fields (Ec) of around 100 kV/cm. Improving the ferroelectric property of PZT film by rare-earth-substitution would be ascribed to the enhancement of the crystal anisotropy. We concluded that ion substitution using some rare-earth cations, such as Y3+, Dy3+ or Er3+, is one of promising technique for improving the ferroelectric property of PZT film.

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