TiO2 thin films from titanium butoxide: Synthesis, Pt addition, structural stability, microelectronic processing and gas-sensing properties

2008 ◽  
Vol 130 (2) ◽  
pp. 599-608 ◽  
Author(s):  
Mauro Epifani ◽  
Andreas Helwig ◽  
Jordi Arbiol ◽  
Raül Díaz ◽  
Luca Francioso ◽  
...  
Keyword(s):  
Thin Films ◽  
Structural Stability ◽  
Gas Sensing ◽  
Tio2 Thin Films ◽  
Titanium Butoxide ◽  
Sensing Properties ◽  
Gas Sensing Properties ◽  
Microelectronic Processing

Hydrogen gas sensors based on nanocrystalline TiO2 thin films

Open Physics ◽  
2011 ◽  
Vol 9 (5) ◽  
Author(s):  
Azhar Haidry ◽  
Peter Schlosser ◽  
Pavol Durina ◽  
Marian Mikula ◽  
Milan Tomasek ◽  
...  
Keyword(s):  
Thin Films ◽  
Annealing Temperature ◽  
Gas Sensing ◽  
Hydrogen Gas ◽  
Tio2 Thin Films ◽  
Nanocrystalline Tio2 ◽  
Sensing Properties ◽  
Gas Sensing Properties ◽  
Hydrogen Gas Sensors ◽  
Titanium Dioxide Thin Films

AbstractTitanium dioxide thin films are extensively studied for applications in solid state gas sensor devices. Their gas sensing properties are strongly dependent on deposition technique, annealing temperature, film thickness and consequent properties like crystalline structure, grain size or amount of defects and impurities. In this work we report the gas sensing properties of TiO2 thin films prepared by reactive magnetron sputtering technique and subsequently annealed at temperatures 600°C and 900°C. The films were exposed to different concentrations of H2 gas up to 10 000 ppm. Their sensitivity to gas at various operating temperatures, ranging from 250°C to 450°C, was obtained by measuring their resistance.

Gas sensing properties of p-type semiconducting Cr-doped TiO2 thin films

2002 ◽  
Vol 83 (1-3) ◽  
pp. 160-163 ◽  
Author(s):  
Yongxiang Li ◽  
Wojtek Wlodarski ◽  
Kosmas Galatsis ◽  
Sayed Hassib Moslih ◽  
Jared Cole ◽  
...  
Keyword(s):  
Thin Films ◽  
Gas Sensing ◽  
Tio2 Thin Films ◽  
Doped Tio2 ◽  
Sensing Properties ◽  
Gas Sensing Properties ◽  
P Type

Gas Sensing Properties of P-type Semiconducting Cr-doped TiO2 Thin Films

2001 ◽  
pp. 840-843 ◽  
Author(s):  
Yongxiang Li ◽  
Wojtek Wlodarski ◽  
Kosmas Galatsis ◽  
Sayed H. Moshli ◽  
Jared Cole ◽  
...  
Keyword(s):  
Thin Films ◽  
Gas Sensing ◽  
Tio2 Thin Films ◽  
Doped Tio2 ◽  
Sensing Properties ◽  
Gas Sensing Properties ◽  
P Type

SnO2 thin films from metalorganic precursors: Synthesis, characterization, microelectronic processing and gas-sensing properties

2007 ◽  
Vol 124 (1) ◽  
pp. 217-226 ◽  
Author(s):  
Mauro Epifani ◽  
Luca Francioso ◽  
Pietro Siciliano ◽  
Andreas Helwig ◽  
Gerhard Mueller ◽  
...  
Keyword(s):  
Thin Films ◽  
Gas Sensing ◽  
Sensing Properties ◽  
Gas Sensing Properties ◽  
Sno2 Thin Films ◽  
Microelectronic Processing

CO gas sensing properties of direct-patternable TiO2 thin films containing multi-wall carbon nanotubes

2013 ◽  
Vol 529 ◽  
pp. 89-93 ◽  
Author(s):  
Hyuncheol Kim ◽  
Min-Hee Hong ◽  
Ho Won Jang ◽  
Seok-Jin Yoon ◽  
Hyung-Ho Park
Keyword(s):  
Thin Films ◽  
Carbon Nanotubes ◽  
Gas Sensing ◽  
Tio2 Thin Films ◽  
Sensing Properties ◽  
Multi Wall Carbon Nanotubes ◽  
Gas Sensing Properties ◽  
Co Gas

Characterization and hydrogen gas sensing properties of TiO2 thin films prepared by sol–gel method

2012 ◽  
Vol 259 ◽  
pp. 270-275 ◽  
Author(s):  
Azhar Ali Haidry ◽  
Jarmila Puskelova ◽  
Tomas Plecenik ◽  
Pavol Durina ◽  
Jan Gregus ◽  
...  
Keyword(s):  
Thin Films ◽  
Gas Sensing ◽  
Sol Gel ◽  
Hydrogen Gas ◽  
Tio2 Thin Films ◽  
Gel Method ◽  
Sensing Properties ◽  
Sol Gel Method ◽  
Gas Sensing Properties

scholarly journals P2.0.5 Studies of Hydrogen Gas Sensing Properties of Anatase TiO2 Thin Films Prepared by Magnetron Sputtering

2012 ◽  
Author(s):  
Azhar Ali Haidry ◽  
Pavol Durina ◽  
Martin Truchly ◽  
Leonid Satrapinsky ◽  
Tomas Plecenik ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Gas Sensing ◽  
Anatase Tio2 ◽  
Hydrogen Gas ◽  
Tio2 Thin Films ◽  
Sensing Properties ◽  
Gas Sensing Properties

Effect of Nb, Cr, Sn additions on gas sensing properties of TiO2 thin films

1997 ◽  
Vol 310 (1-2) ◽  
pp. 161-166 ◽  
Author(s):  
Katarzyna Zakrzewska ◽  
Marta Radecka ◽  
Mieczyslaw Rekas
Keyword(s):  
Thin Films ◽  
Gas Sensing ◽  
Tio2 Thin Films ◽  
Sensing Properties ◽  
Gas Sensing Properties
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