SiH4 enhanced dissociation via argon plasma assistance for hydrogenated microcrystalline silicon thin-film deposition and application in tandem solar cells

2018 ◽  
Vol 180 ◽  
pp. 110-117 ◽  
Author(s):  
Tiantian Li ◽  
Shengzhi Xu ◽  
Qian Huang ◽  
Huizhi Ren ◽  
Jian Ni ◽  
...  
2015 ◽  
Vol 591 ◽  
pp. 97-104 ◽  
Author(s):  
M. Dosmailov ◽  
L.N. Leonat ◽  
J. Patek ◽  
D. Roth ◽  
P. Bauer ◽  
...  

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