Brillouin light scattering characterization of the surface acoustic wave velocity in the ZnO/ Si3N4 /Si(100) system

2006 ◽  
Vol 39 (1-4) ◽  
pp. 75-82 ◽  
Author(s):  
E. Céspedes ◽  
R.J. Jiménez-Riobóo ◽  
M. Vila ◽  
C. Prieto
Keyword(s):  
Light Scattering ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Wave Velocity ◽  
Brillouin Light Scattering ◽  
Acoustic Wave Velocity

Strength-porosity relationship of nanoporous MSSQ films characterised by Brillouin Light Scattering and Surface Acoustic Wave Spectroscopy

2002 ◽  
Vol 716 ◽  
Author(s):  
C.M. Flannery ◽  
T. Wittkowski ◽  
K. Jung ◽  
B. Hillebrands ◽  
M.R. Baklanov
Keyword(s):  
Dielectric Constant ◽  
Light Scattering ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Low Dielectric Constant ◽  
Brillouin Light Scattering ◽  
Low Dielectric ◽  
Stiffness Properties ◽  
Relationship Of

AbstractNanoporous Methylsilsesquioxane films are a leading candidate for low dielectric constant (low-κ) materials for microelectronic interconnect. Mechanical strength reduces rapidly with lower κ (increasing porosity) however, and there is a lack of techniques to characterize these properties in the κ∼2 range. This work reports application of surface acoustic wave spectroscopy and Brillouin light scattering to characterization of density/porosity and Young's modulus values of a range of Methylsilsesquioxane films from different manufacturers. We show that the results are validated by independent measurements and that nanoindentation measurements consistently overestimate stiffness. The behaviour of 3 sets of films show different stiffness-porosity relationships, the initially stiffer materials declining more rapidly with increasing porosity than the softer materials. This has important consequences for stiffness properties in the κ<2 region.

Temperature dependence of surface acoustic wave velocity in thin metal films

1991 ◽  
Vol 202 (1) ◽  
pp. 171-179 ◽  
Author(s):  
Shu-Yi Zhang ◽  
Liang Guo ◽  
An Hu ◽  
Qiu-Shi Gao ◽  
Zhong-Nan Lu
Keyword(s):  
Acoustic Wave ◽  
Temperature Dependence ◽  
Surface Acoustic Wave ◽  
Wave Velocity ◽  
Metal Films ◽  
Thin Metal ◽  
Thin Metal Films ◽  
Acoustic Wave Velocity

Effect of metallisation on surface acoustic wave velocity in GaN-on-sapphire structures

2000 ◽  
Vol 36 (6) ◽  
pp. 591 ◽  
Author(s):  
D. Čiplys ◽  
R. Rimeika ◽  
R. Gaska ◽  
M.S. Shur ◽  
A. Khan ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Wave Velocity ◽  
Acoustic Wave Velocity

Factors Influencing the Variation of Surface Acoustic Wave Velocity in Lithium Tetraborate

1997 ◽  
Vol 36 (Part 1, No. 5B) ◽  
pp. 3074-3075 ◽  
Author(s):  
Vincent Vezin ◽  
Shinichiro Inui ◽  
Kunio Yamaguchi ◽  
Tamotsu Sugawara ◽  
Ryuichi Komatsu ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Wave Velocity ◽  
Lithium Tetraborate ◽  
Acoustic Wave Velocity ◽  
Factors Influencing

scholarly journals Laser photoacoustic technique for ultrasonic surface acoustic wave velocity evaluation on porcelain

Laser Physics ◽  
2016 ◽  
Vol 26 (10) ◽  
pp. 106101 ◽  
Author(s):  
K Qian ◽  
S J Tu ◽  
L Gao ◽  
J Xu ◽  
S D Li ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Wave Velocity ◽  
Photoacoustic Technique ◽  
Acoustic Wave Velocity
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