Effect of asynchronous pulsing parameters on the structure and properties of CrAlN films deposited by pulsed closed field unbalanced magnetron sputtering (P-CFUBMS)
2008 ◽
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2013 ◽
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1990 ◽
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pp. 270-278
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2009 ◽
Vol 204
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pp. 978-982
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Keyword(s):
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Vol 204
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pp. 931-935
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