Finite element simulation of the effect of surface roughness on nanoindentation of thin films with spherical indenters

2007 ◽  
Vol 202 (4-7) ◽  
pp. 1103-1107 ◽  
Author(s):  
C. Walter ◽  
T. Antretter ◽  
R. Daniel ◽  
C. Mitterer
Keyword(s):  
Thin Films ◽  
Surface Roughness ◽  
Finite Element ◽  
Finite Element Simulation ◽  
Element Simulation ◽  
Effect Of Surface

Research on Surface Roughness of Supersonic Vibration Auxiliary Side Milling for Titanium Alloy

2021 ◽  
Author(s):  
XueTao Wei ◽  
caixue yue ◽  
DeSheng Hu ◽  
XianLi Liu ◽  
YunPeng Ding ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Finite Element ◽  
Prediction Model ◽  
Simulation Model ◽  
Finite Element Simulation ◽  
Simulation Software ◽  
Surface Roughness Prediction ◽  
Contour Shape ◽  
Element Simulation ◽  
Roughness Prediction

Abstract The processed surface contour shape is extracted with the finite element simulation software, and the difference value of contour shape change is used as the parameters of balancing surface roughness to construct the infinitesimal element cutting finite element model of supersonic vibration milling in cutting stability domain. The surface roughness trial scheme is designed in the central composite test design method to analyze the surface roughness test result in the response surface methodology. The surface roughness prediction model is established and optimized. Finally, the finite element simulation model and surface roughness prediction model are verified and analyzed through experiment. The research results show that, compared with the experiment results, the maximum error of finite element simulation model and surface roughness prediction model is 30.9% and12.3%, respectively. So, the model in this paper is accurate and will provide the theoretical basis for optimization study of auxiliary milling process of supersonic vibration.

The Influence of the Substrate on the Mechanical Properties of Si-Doped DLC Thin Films

2008 ◽  
Vol 587-588 ◽  
pp. 839-843 ◽  
Author(s):  
Carlos W. Moura e Silva ◽  
Jose R.T. Branco ◽  
Marta C. Oliveira ◽  
Jorge M. Antunes ◽  
Albano Cavaleiro
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Finite Element ◽  
Stainless Steel ◽  
Elastic Modulus ◽  
Finite Element Simulation ◽  
Gas Mixtures ◽  
Element Simulation ◽  
Si Doped ◽  
Si Content

In this work, Si-doped DLC films were deposited on stainless steel (316SS) and polycarbonate (PC) substrates by RF-PACVD in gas mixtures of SiH4+CH4, with 2, 5 and 10 vol.% SiH4. The increase of the Si content in the films led to a progressive drop in the hardness from 30 GPa down to 23 GPa whereas the elastic modulus increased from 124 GPa up to 146 GPa, as measured in the SS coated substrates. In the case of coated PC samples pop-in was observed in the loading curve which was interpreted by finite element simulation and nanoscratching techniques.

A Combined Experimental and Numerical Study of the Effect of Surface Roughness on Nanoindentation

2019 ◽  
Vol 11 (07) ◽  
pp. 1950070
Author(s):  
M. Nazemian ◽  
M. Chamani ◽  
M. Baghani
Keyword(s):  
Thin Films ◽  
Surface Roughness ◽  
Finite Element ◽  
Rough Surface ◽  
Numerical Study ◽  
Three Dimensional ◽  
Element Model ◽  
Element Analysis ◽  
Three Dimensional Finite Element ◽  
Effect Of Surface

Gold and copper thin films are widely used in microelectromechanical system (MEMS) and nanoelectromechanical system (NEMS) devices. Nanoindentation has been developed in mechanical characterization of thin films in recent years. Several researchers have examined the effect of surface roughness on nanoindentation results. It is proved that the surface roughness has great importance in nanoindentation of thin films. In this paper, the surface topography of thin films is simulated using the extracted data from the atomic force microscopy (AFM) images. Nanoindentation on a rough surface is simulated using a three-dimensional finite-element model. The results are compared with the results of finite-element analysis on a smooth surface and the experimental results. The results revealed that the surface roughness plays a key role in nanoindentation of thin films, especially at low indentation depths. There was good compatibility between the results of finite-element simulation on the rough surface and those of experiments. It is observed that on rough films, at low indentation depths, the geometry of the location where the nanoindentation is performed is of major importance.

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