Effect of Al content on the microstructure and mechanical properties of Mo–Al–Si–N films synthesized by DC magnetron sputtering
2010 ◽
Vol 204
(21-22)
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pp. 3371-3375
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2011 ◽
Vol 205
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pp. 5068-5072
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2011 ◽
Vol 205
(8-9)
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pp. 3080-3086
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2013 ◽
Vol 303-306
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pp. 2514-2518
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2016 ◽
Vol 304
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2017 ◽
Vol 332
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2011 ◽
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2003 ◽
Vol 52
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pp. 143-148
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