Microstructure and mechanical properties of carbon nitride multilayer films deposited by DC magnetron sputtering
2011 ◽
Vol 205
(8-9)
◽
pp. 3080-3086
◽
2010 ◽
Vol 204
(21-22)
◽
pp. 3371-3375
◽
2011 ◽
Vol 205
(21-22)
◽
pp. 5068-5072
◽
2013 ◽
Vol 303-306
◽
pp. 2514-2518
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2010 ◽
Vol 205
(7)
◽
pp. 2474-2482
◽
2016 ◽
Vol 304
◽
pp. 203-210
◽
2017 ◽
Vol 332
◽
pp. 190-197
◽
2011 ◽
Vol 205
(19)
◽
pp. 4471-4479
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