Influence of negative bias pulse parameters on accumulation of macroparticles on the substrate immersed in titanium vacuum arc plasma

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2016.06.026 ◽

2016 ◽

Vol 306 ◽

pp. 251-256 ◽

Cited By ~ 7

Author(s):

Alexander I. Ryabchikov ◽

Peter S. Ananin ◽

Denis O. Sivin ◽

Sergey V. Dektyarev ◽

Anna I. Bumagina ◽

...

Keyword(s):

Vacuum Arc ◽

Negative Bias ◽

Arc Plasma ◽

Pulse Parameters ◽

Bias Pulse

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Negative bias effect on film growth using pulsed vacuum arc plasma for multilayers

Surface and Coatings Technology ◽

10.1016/s0257-8972(00)01033-1 ◽

2001 ◽

Vol 136 (1-3) ◽

pp. 285-289

Author(s):

Sung-Yong Chun ◽

Akiyoshi Chayahara ◽

Yuji Horino

Keyword(s):

Film Growth ◽

Vacuum Arc ◽

Negative Bias ◽

Arc Plasma ◽

Bias Effect

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Structure and Properties of Periodic Multilayer Metal/nitride Coatings Deposited from Filtered Vacuum-arc Plasma Using Ti-Al-Y Cathode

2020 IEEE 10th International Conference Nanomaterials: Applications & Properties (NAP) ◽

10.1109/nap51477.2020.9309561 ◽

2020 ◽

Author(s):

Vladimir Vasyliev ◽

Alexander Luchaninov ◽

Elena Reshetnyak ◽

Vladimir Strel'nitskij

Keyword(s):

Vacuum Arc ◽

Arc Plasma ◽

Structure And Properties ◽

Metal Nitride ◽

Nitride Coatings ◽

Multilayer Metal

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On the relation of the ion velocity to the ion charge in the vacuum arc plasma

Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041) ◽

10.1109/deiv.2000.877298 ◽

2002 ◽

Author(s):

A.G. Parfyonov

Keyword(s):

Vacuum Arc ◽

Arc Plasma ◽

Ion Velocity

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Spatial distribution of the vacuum arc plasma fluxes in a curvilinear magnetic duct

IEEE Transactions on Plasma Science ◽

10.1109/tps.2005.856506 ◽

2005 ◽

Vol 33 (5) ◽

pp. 1636-1640 ◽

Cited By ~ 2

Author(s):

A.I. Timoshenko ◽

V.S. Taran ◽

V.I. Tereshin ◽

O.G. Chechel'nitskiy

Keyword(s):

Spatial Distribution ◽

Vacuum Arc ◽

Arc Plasma

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Characterization of a 1 kA vacuum arc plasma gun for use as a metal vapour deposition source

Surface and Coatings Technology ◽

10.1016/0257-8972(90)90041-a ◽

1990 ◽

Vol 43-44 ◽

pp. 1024-1034 ◽

Cited By ~ 34

Author(s):

R.L. Boxman ◽

S. Goldsmith

Keyword(s):

Vapour Deposition ◽

Vacuum Arc ◽

Arc Plasma ◽

Metal Vapour ◽

Plasma Gun

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Comparative properties of titanium oxide biomaterials grown by pulsed vacuum arc plasma deposition and by unbalanced magnetron sputtering(UBM)

The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. ◽

10.1109/plasma.2003.1229980 ◽

2003 ◽

Author(s):

Y.X. Leng ◽

J.Y. Chen ◽

G.J. Wan ◽

H. Sun ◽

P. Yang ◽

...

Keyword(s):

Magnetron Sputtering ◽

Titanium Oxide ◽

Plasma Deposition ◽

Vacuum Arc ◽

Arc Plasma ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Automatically reigniting dc vacuum arc plasma source

Review of Scientific Instruments ◽

10.1063/1.1494868 ◽

2002 ◽

Vol 73 (8) ◽

pp. 2971-2973 ◽

Cited By ~ 3

Author(s):

Liuhe Li ◽

Tao Zhang ◽

Paul K. Chu ◽

Ian G. Brown

Keyword(s):

Plasma Source ◽

Vacuum Arc ◽

Arc Plasma

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High efficiency filtered vacuum-arc plasma source

XXIst International Symposium on Discharges and Electrical Insulation in Vacuum, 2004. Proceedings. ISDEIV. ◽

10.1109/deiv.2004.1422654 ◽

2004 ◽

Cited By ~ 19

Author(s):

I.I. Aksenov ◽

V.V. Vasilyev ◽

A.A. Luchaninov ◽

A.O. Omarov ◽

V.E. Strel'nitskij ◽

...

Keyword(s):

High Efficiency ◽

Plasma Source ◽

Vacuum Arc ◽

Arc Plasma

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The effect of axisymmetric two-dimensional magnetic field on the configuration of vacuum-arc plasma

High Temperature ◽

10.1007/s10740-006-0020-4 ◽

2006 ◽

Vol 44 (2) ◽

pp. 166-171 ◽

Cited By ~ 2

Author(s):

E. F. Prozorov ◽

K. N. Ul’yanov ◽

V. A. Fedorov

Keyword(s):

Magnetic Field ◽

Vacuum Arc ◽

Two Dimensional ◽

Arc Plasma

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Deuterium ions in vacuum arc plasma with composite gas-saturated zirconium cathode in a magnetic field

Plasma Sources Science and Technology ◽

10.1088/1361-6595/ab2b7f ◽

2019 ◽

Vol 28 (7) ◽

pp. 075015 ◽

Cited By ~ 4

Author(s):

Valeria P Frolova ◽

Alexey G Nikolaev ◽

Efim M Oks ◽

Georgy Yu Yushkov

Keyword(s):

Magnetic Field ◽

Vacuum Arc ◽

Arc Plasma

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