Dense VSiCN coatings deposited by filament-assisted reactive magnetron sputtering with varying amorphous phase precursor flow rates

2021 ◽  
pp. 127507
Author(s):  
Forest C. Thompson ◽  
Frank M. Kustas ◽  
Kent E. Coulter ◽  
Grant A. Crawford
Keyword(s):  
Magnetron Sputtering ◽  
Amorphous Phase ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Flow Rates ◽  
Phase Precursor

Performance improvement of TiO2/CuO by increasing oxygen flow rates and substrate temperature using DC reactive magnetron sputtering method

Optik ◽  
2020 ◽  
Vol 206 ◽  
pp. 164297
Author(s):  
Paulina Sawicka-Chudy ◽  
Grzegorz Wisz ◽  
Maciej Sibiński ◽  
Zbigniew Starowicz ◽  
Łukasz Głowa ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Substrate Temperature ◽  
Performance Improvement ◽  
Reactive Magnetron Sputtering ◽  
Oxygen Flow ◽  
Reactive Magnetron ◽  
Flow Rates ◽  
Dc Reactive Magnetron Sputtering

Influence of nitrogen flow rates on iron nitride thin films prepared by DC reactive magnetron sputtering

2017 ◽  
Vol 4 (5) ◽  
pp. 6173-6177 ◽  
Author(s):  
K. Jantasom ◽  
M. Horprathum ◽  
P. Eiamchai ◽  
S. Limwichean ◽  
N. Nuntawong ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Iron Nitride ◽  
Reactive Magnetron ◽  
Nitrogen Flow ◽  
Flow Rates ◽  
Dc Reactive Magnetron Sputtering

Investigation on the Structure and Properties of TiAlN Coatings Deposited by DC Reactive Magnetron Sputtering

2010 ◽  
Vol 154-155 ◽  
pp. 1639-1642
Author(s):  
Xuan Wang ◽  
Kui Zhang ◽  
Guang Hui Yue ◽  
Dong Liang Peng ◽  
Zheng Bing Qi ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Tial Alloy ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Compact Structure ◽  
Flow Rates ◽  
Dc Power ◽  
Dc Reactive Magnetron Sputtering ◽  
Alloy Target ◽  
N2 Flow Rate

TiAlN coatings have been deposited by reactive magnetron sputtering from TiAl alloy target using a direct current (DC) power source. The crystal structure, chemical composition, surface morphology and hardness of TiAlN coatings which were prepared at various N2 flow rates have been systemically investigated. The results show a strong effect of N2 flow rates on the orientation, grain size and densification in TiAlN coatings. The TiAlN coating shows the highest hardness at a certain N2 flow rate when it has the most compact structure.

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