Nano–level finishing of single crystal silicon blank using magnetorheological finishing process
2012 ◽
Vol 47
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pp. 159-166
◽
Keyword(s):
2018 ◽
Vol 100
(5-8)
◽
pp. 1043-1054
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2011 ◽
Vol 55
(1-4)
◽
pp. 243-252
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Keyword(s):
1985 ◽
Vol 43
◽
pp. 300-301
1992 ◽
Vol 112
(9)
◽
pp. 835-839
Keyword(s):