Influence of deposition parameters on surface roughness and mechanical properties of boron carbon nitride coatings synthesized by ion beam assisted deposition

2006 ◽  
Vol 497 (1-2) ◽  
pp. 210-217 ◽  
Author(s):  
Fei Zhou ◽  
Koshi Adachi ◽  
Koji Kato
Keyword(s):  
Mechanical Properties ◽  
Surface Roughness ◽  
Carbon Nitride ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition ◽  
Deposition Parameters ◽  
Nitride Coatings ◽  
Boron Carbon Nitride ◽  
Boron Carbon

Preparation of carbon nitride thin films by ion beam assisted deposition and their mechanical properties

1997 ◽  
Vol 308-309 ◽  
pp. 239-244 ◽  
Author(s):  
M Kohzaki ◽  
A Matsumuro ◽  
T Hayashi ◽  
M Muramatsu ◽  
K Yamaguchi
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Carbon Nitride ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition

Physical properties of a-C: N films produced by ion beam assisted deposition

1994 ◽  
Vol 9 (9) ◽  
pp. 2440-2449 ◽  
Author(s):  
François Rossi ◽  
Bernard André ◽  
A. van Veen ◽  
P.E. Mijnarends ◽  
H. Schut ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Friction Coefficient ◽  
Physical Properties ◽  
Ion Beam ◽  
Positron Annihilation Spectroscopy ◽  
Carbon Films ◽  
Ir Studies ◽  
Ion Beam Assisted Deposition ◽  
Deposition Parameters ◽  
Average Damage

Carbon films with up to 32 at. % of nitrogen have been prepared with ion beam assisted magnetron, using a N2+/N+ beam at energies between 50 and 300 eV. The composition and density of the films vary strongly with the deposition parameters. EELS, SXS, XPS, and IR studies show that these a-C: N films are mostly graphitic and have up to 20% sp3 bonding. Nitrogen is mostly combined with carbon in nitrile (C ≡ N) and imine (C=N) groups. It is shown by RBS and NDP that density goes through a maximum as the average damage energy per incoming ion increases. Positron annihilation spectroscopy shows that the void concentration in the films goes through a minimum with average damage energy. These results are consistent with a densification induced by the collisions at low average damage energy values and induced graphitization at higher damage energy values. These results are similar to what is observed for Ar ion assisted deposition of a-C films. The mechanical properties of these films have been studied with a nanoindenter, and it was found that the hardness and Young's modulus go through a maximum as the average damage energy is increased. The maximum of mechanical properties corresponds to the minimum in the void concentration in the film. Tribological studies of the a-C: N show that the friction coefficient obtained against diamond under dynamic loading decreases strongly as the nitrogen composition increases, this effect being more pronounced at low loads.

Ar Ion Effect on Mechanical Properties of Carbon Nitride Films Prepared by Ion-Beam-Assisted Deposition

2002 ◽  
Vol 41 (Part 1, No. 12) ◽  
pp. 7455-7461 ◽  
Author(s):  
Hidenobu Ohta ◽  
Akihito Matsumuro ◽  
Yutaka Takahashi
Keyword(s):  
Mechanical Properties ◽  
Carbon Nitride ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition

Effect of Substrate Materials on Mechanical Properties and Microstructure of Carbon Nitride Films Prepared by Ion-beam-assisted deposition

2000 ◽  
Vol 647 ◽  
Author(s):  
Hidenobu Ohta ◽  
Akihito Matsumuro ◽  
Yutaka Takahashi
Keyword(s):  
Mechanical Properties ◽  
Carbon Nitride ◽  
Ion Beam ◽  
Pure Titanium ◽  
Carbon Layer ◽  
Bearing Steel ◽  
Cross Sectional ◽  
Ion Beam Assisted Deposition ◽  
Transmission Electron ◽  
Aluminum Alloy 7075

AbstractCarbon nitride (C-N) thin films were prepared on several substrates by ion-beam-assisted deposition technique. In this experiment, carbon was evaporated by electron beam. Nitrogen and argon ion beams were bombarded simultaneously. Aluminum alloy (7075), high-carbon chrome bearing steel (SUJ2), pure titanium plates (99.5%) and Si(100) wafer were used as substrates. Here, mechanical properties, such as hardness, adhesion, friction coefficient and wear resistance were investigated. These results show the adhesion between the films and substrates were improved by formation of the carbon layer. The microstructure of the carbon nitride films were investigated by cross sectional high-resolution transmission electron microscopy (HRTEM).

Micro-Hardness and Adhesion of Boron Carbon Nitride Coatings

1997 ◽  
Vol 11 (16n17) ◽  
pp. 749-756 ◽  
Author(s):  
Hou Qingrun ◽  
J. Gao
Keyword(s):  
Carbon Nitride ◽  
Pulsed Laser ◽  
Hardness Test ◽  
Laser Deposition ◽  
Micro Hardness ◽  
Nitride Coatings ◽  
Quartz Substrates ◽  
Boron Carbon Nitride ◽  
Vickers Micro Hardness ◽  
Boron Carbon

Boron carbon nitride coatings have been synthesized by the pulsed laser deposition method. Vickers micro-hardness and adhesion of the coatings were studied. A new model was applied to determine the hardness of the coatings which were too thin to be directly measured by the Vickers micro-hardness test. An intermediate layer of silicon was used to enhance the adhesion of the coatings on stainless steel, glass, and quartz substrates.

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