Preparation of aluminum doped zinc oxide films and the study of their microstructure, electrical and optical properties

Thin Solid Films ◽

10.1016/j.tsf.2007.01.041 ◽

2007 ◽

Vol 515 (17) ◽

pp. 6909-6914 ◽

Author(s):

Hong-ming Zhou ◽

Dan-qing Yi ◽

Zhi-ming Yu ◽

Lai-rong Xiao ◽

Jian Li

Keyword(s):

Optical Properties ◽

Oxide Films ◽

Electrical And Optical Properties ◽

Zinc Oxide Films ◽

Aluminum Doped Zinc Oxide

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Structural, electrical and optical properties of aluminum doped zinc oxide films prepared by radio frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.365556 ◽

1997 ◽

Vol 81 (12) ◽

pp. 7764-7772 ◽

Author(s):

Kun Ho Kim ◽

Ki Cheol Park ◽

Dae Young Ma

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Zinc Oxide Films ◽

Aluminum Doped Zinc Oxide

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Erratum: “Structural, electrical and optical properties of aluminum doped zinc oxide films prepared by rf magnetron sputtering” [J. Appl. Phys. 81, 7764 (1997)]

Journal of Applied Physics ◽

10.1063/1.368071 ◽

1998 ◽

Vol 84 (1) ◽

pp. 660-660

Author(s):

Kun Ho Kim ◽

Ki Cheol Park ◽

Dae Young Ma

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Oxide Films ◽

Rf Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Zinc Oxide Films ◽

Aluminum Doped Zinc Oxide

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Microwave hydrogen plasma annealing to improve electrical and optical properties of aluminum doped zinc oxide films

2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT) ◽

10.1109/impact.2011.6117210 ◽

2011 ◽

Author(s):

Shang-Chou Chang ◽

To-Sing Li ◽

Bo-You Chen ◽

Tien-Chai Lin

Keyword(s):

Optical Properties ◽

Hydrogen Plasma ◽

Oxide Films ◽

Electrical And Optical Properties ◽

Zinc Oxide Films ◽

Aluminum Doped Zinc Oxide ◽

Plasma Annealing

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Deposition of aluminum-doped zinc oxide films by RF magnetron sputtering and study of their structural, electrical and optical properties

Thin Solid Films ◽

10.1016/s0040-6090(03)00376-6 ◽

2003 ◽

Vol 435 (1-2) ◽

pp. 78-82 ◽

Author(s):

S.H. Jeong ◽

J.W. Lee ◽

S.B. Lee ◽

J.H. Boo

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Oxide Films ◽

Rf Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Zinc Oxide Films ◽

Aluminum Doped Zinc Oxide

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Optical properties of aluminum-doped zinc oxide films deposited by direct-current pulse magnetron reactive sputtering

Chinese Physics B ◽

10.1088/1674-1056/23/3/030701 ◽

2014 ◽

Vol 23 (3) ◽

pp. 030701 ◽

Author(s):

Xiao-Yong Gao ◽

Chao Chen ◽

Sa Zhang

Keyword(s):

Optical Properties ◽

Current Pulse ◽

Direct Current ◽

Oxide Films ◽

Reactive Sputtering ◽

Zinc Oxide Films ◽

Pulse Magnetron ◽

Aluminum Doped Zinc Oxide

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Electrical and optical properties of RF sputtered zinc oxide films

[Proceedings] 1990 IEEE 7th International Symposium on Applications of Ferroelectrics ◽

10.1109/isaf.1990.200354 ◽

2002 ◽

Author(s):

A.K. Arora ◽

R. Srivastava ◽

A. Mansingh

Keyword(s):

Optical Properties ◽

Oxide Films ◽

Electrical And Optical Properties ◽

Zinc Oxide Films

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ChemInform Abstract: Deposition of Boron Doped Zinc Oxide Films and Their Electrical and Optical Properties.

10.1002/chin.199243016 ◽

2010 ◽

Vol 23 (43) ◽

pp. no-no

Author(s):

J. HU ◽

R. G. GORDON

Keyword(s):

Optical Properties ◽

Oxide Films ◽

Electrical And Optical Properties ◽

Zinc Oxide Films ◽

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Electrical and optical properties of Al–N co-doped p-type zinc oxide films

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2004.05.008 ◽

2004 ◽

Vol 268 (1-2) ◽

pp. 163-168 ◽

Author(s):

Fei Zhu-Ge ◽

Zhi-Zhen Ye ◽

Li-Ping Zhu ◽

Jian-Guo Lü ◽

Bing-Hui Zhao ◽

...

Keyword(s):

Optical Properties ◽

Oxide Films ◽

Electrical And Optical Properties ◽

Zinc Oxide Films ◽

P Type ◽

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Effects of the position substrate upon the structural behaviour, electrical and optical properties of zinc-oxide films used in solar cells

Applied Energy ◽

10.1016/s0306-2619(99)00047-1 ◽

1999 ◽

Vol 64 (1-4) ◽

pp. 89-96 ◽

Author(s):

M. Bouderbala ◽

S. Hamzaoui ◽

A.B. Stambouli ◽

H. Bouziane

Keyword(s):

Optical Properties ◽

Solar Cells ◽

Oxide Films ◽

Structural Behaviour ◽

Electrical And Optical Properties ◽

Zinc Oxide Films

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Study on the structural, electrical, and optical properties of aluminum-doped zinc oxide films by direct current pulse reactive magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2009.02.133 ◽

2009 ◽

Vol 517 (16) ◽

pp. 4684-4688 ◽

Author(s):

Gao Xiao-Yong ◽

Lin Qing-Geng ◽

Feng Hong-Liang ◽

Liu Yu-Fen ◽

Lu Jing-Xiao

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Current Pulse ◽

Direct Current ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Electrical And Optical Properties ◽

Zinc Oxide Films ◽

Aluminum Doped Zinc Oxide

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