Study on the structural, electrical, and optical properties of aluminum-doped zinc oxide films by direct current pulse reactive magnetron sputtering

2009 ◽  
Vol 517 (16) ◽  
pp. 4684-4688 ◽  
Author(s):  
Gao Xiao-Yong ◽  
Lin Qing-Geng ◽  
Feng Hong-Liang ◽  
Liu Yu-Fen ◽  
Lu Jing-Xiao
Keyword(s):  
Zinc Oxide ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Current Pulse ◽  
Direct Current ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Electrical And Optical Properties ◽  
Zinc Oxide Films ◽  
Aluminum Doped Zinc Oxide

Electrical and optical properties of zinc oxide thin films grown by reactive magnetron sputtering method

2004 ◽  
Vol 109 (1-3) ◽  
pp. 241-244 ◽  
Author(s):  
Kh.A. Abdullin ◽  
A.B. Aimagambetov ◽  
N.B. Beisenkhanov ◽  
A.T. Issova ◽  
B.N. Mukashev ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Oxide Thin Films ◽  
Electrical And Optical Properties
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