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Relationships between material properties of piezo-electric thin films and device characteristics of film bulk acoustic resonators
Thin Solid Films
◽
10.1016/j.tsf.2007.07.145
◽
2007
◽
Vol 516
(2-4)
◽
pp. 475-480
◽
Cited By ~ 11
Author(s):
Jin-Bock Lee
◽
Dong-Hyun Cho
◽
Do-Young Kim
◽
Chang-Kyun Park
◽
Jin-Seok Park
Keyword(s):
Thin Films
◽
Material Properties
◽
Acoustic Resonators
◽
Film Bulk Acoustic Resonators
◽
Film Bulk
◽
Piezo Electric
Download Full-text
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Frequency Response of Thin-Film Bulk Acoustic Resonators to the Deposition of Tungsten, Platinum, Aluminium Oxide and Carbon Nanotube Thin-Films
Micro and Nanosystems
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10.2174/1876402911204020111
◽
2012
◽
Vol 4
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◽
pp. 111-117
Author(s):
Martin Nirschl
◽
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◽
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◽
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◽
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◽
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High coupling piezoelectric thin films of Pb(Zr,Ti)O3-based ternary perovskite compounds for GHz-range film bulk acoustic resonators
Applied Physics Letters
◽
10.1063/1.3126060
◽
2009
◽
Vol 94
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◽
pp. 172903
◽
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◽
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◽
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◽
...
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Thin Films
◽
Acoustic Resonators
◽
Piezoelectric Thin Films
◽
Film Bulk Acoustic Resonators
◽
Film Bulk
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Electromechanical properties of Al0.9Sc0.1N thin films evaluated at 2.5 GHz film bulk acoustic resonators
Applied Physics Letters
◽
10.1063/1.3629773
◽
2011
◽
Vol 99
(9)
◽
pp. 092903
◽
Cited By ~ 96
Author(s):
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◽
Alvaro Artieda
◽
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◽
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◽
Paul Muralt
Keyword(s):
Thin Films
◽
Electromechanical Properties
◽
Acoustic Resonators
◽
Film Bulk Acoustic Resonators
◽
Film Bulk
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Thin-film bulk acoustic resonators and filters using ZnO and lead-zirconium-titanate thin films
IEEE Transactions on Microwave Theory and Techniques
◽
10.1109/22.915462
◽
2001
◽
Vol 49
(4)
◽
pp. 769-778
◽
Cited By ~ 116
Author(s):
Q.-X. Su
◽
P. Kirby
◽
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◽
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◽
Q. Zhang
◽
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Keyword(s):
Thin Film
◽
Thin Films
◽
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◽
Lead Zirconium Titanate
◽
Acoustic Resonators
◽
Film Bulk Acoustic Resonators
◽
Film Bulk
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Editorial [Hot Topic: Sensing the World with Film Bulk Acoustic Resonators (Guest Editor: Xiaotun Qiu)]
Micro and Nanosystems
◽
10.2174/1876402911103020090
◽
2011
◽
Vol 3
(2)
◽
pp. 90-90
Author(s):
Xiaotun Qiu
Keyword(s):
Guest Editor
◽
Acoustic Resonators
◽
Film Bulk Acoustic Resonators
◽
The World
◽
Film Bulk
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Thin film piezoelectric property considerations for surface acoustic wave and thin film bulk acoustic resonators
Journal of the European Ceramic Society
◽
10.1016/s0955-2219(03)00147-x
◽
2003
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Vol 23
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◽
pp. 2689-2692
◽
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Author(s):
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◽
M.D.G Potter
◽
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◽
M.Y Lim
Keyword(s):
Thin Film
◽
Acoustic Wave
◽
Piezoelectric Property
◽
Surface Acoustic Wave
◽
Acoustic Resonators
◽
Film Bulk Acoustic Resonators
◽
Film Bulk
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Development of an X-Band Filter Using Air-Gap-Type Film Bulk Acoustic Resonators
Japanese Journal of Applied Physics
◽
10.1143/jjap.47.4007
◽
2008
◽
Vol 47
(5)
◽
pp. 4007-4010
◽
Cited By ~ 36
Author(s):
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◽
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◽
Shinji Taniguchi
◽
Tsuyoshi Yokoyama
◽
Tokihiro Nishihara
◽
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Keyword(s):
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◽
Acoustic Resonators
◽
Band Filter
◽
X Band
◽
Film Bulk Acoustic Resonators
◽
Film Bulk
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An Accurate In-Fixture Measurement Method for AlN Film Bulk Acoustic Resonators
2012 Fourth International Symposium on Information Science and Engineering
◽
10.1109/isise.2012.46
◽
2012
◽
Author(s):
Hang Xu
◽
Yanjie Su
◽
Hanlin Yang
◽
Dong Xu
◽
Yafei Zhang
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Acoustic Resonators
◽
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Film Bulk Acoustic Resonators
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Film Bulk
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CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing
Sensors
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10.3390/s100504180
◽
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Super High-Frequency Scandium Aluminum Nitride Crystalline Film Bulk Acoustic Resonators
2019 IEEE International Ultrasonics Symposium (IUS)
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10.1109/ultsym.2019.8925598
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Cited By ~ 4
Author(s):
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◽
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◽
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◽
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◽
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Acoustic Resonators
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Film Bulk
◽
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