Durability of nitrided fluorocarbon polymer films for nanoimprint lithography
2003 ◽
Vol 174-175
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pp. 509-514
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Keyword(s):
2008 ◽
Vol 2008.18
(0)
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pp. 278-280
Keyword(s):
2010 ◽
Vol 143-144
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pp. 792-796
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Keyword(s):
2017 ◽
Vol 24
(1)
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pp. 389-395
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2006 ◽
Vol 21
(1)
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pp. 242-254
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1996 ◽
Vol 34
(2)
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pp. 193-198
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