High-rate deposition of high-quality Sn-doped In2O3 films by reactive magnetron sputtering using alloy targets

2012 ◽  
Vol 520 (12) ◽  
pp. 4101-4105 ◽  
Author(s):  
Nobuto Oka ◽  
Yukari Kawase ◽  
Yuzo Shigesato
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
High Rate ◽  
Reactive Magnetron ◽  
High Quality

Growth of high quality AlN films on CVD diamond by RF reactive magnetron sputtering

2018 ◽  
Vol 431 ◽  
pp. 152-159 ◽  
Author(s):  
Liang-xian Chen ◽  
Hao Liu ◽  
Sheng Liu ◽  
Cheng-ming Li ◽  
Yi-chao Wang ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Cvd Diamond ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
High Quality

scholarly journals High-Rate Deposition of Stoichiometric Compounds by Reactive Magnetron Sputtering at Oblique Angles

2016 ◽  
Vol 13 (10) ◽  
pp. 960-964 ◽  
Author(s):  
Rafael Alvarez ◽  
Aurelio Garcia-Valenzuela ◽  
Carmen Lopez-Santos ◽  
Francisco J. Ferrer ◽  
Victor Rico ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
High Rate ◽  
Reactive Magnetron

High-rate deposition of Ta-doped SnO2 films by reactive magnetron sputtering using a Sn–Ta metal-sintered target

2012 ◽  
Vol 520 (10) ◽  
pp. 3746-3750 ◽  
Author(s):  
Y. Muto ◽  
S. Nakatomi ◽  
N. Oka ◽  
Y. Iwabuchi ◽  
H. Kotsubo ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
High Rate ◽  
Reactive Magnetron
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