Growth of high quality AlN films on CVD diamond by RF reactive magnetron sputtering
2018 ◽
Vol 431
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pp. 152-159
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Keyword(s):
2013 ◽
Vol 64
◽
pp. 319-330
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1999 ◽
Vol 67-68
◽
pp. 261-268
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2009 ◽
Vol 203
(23)
◽
pp. 3661-3668
◽
Keyword(s):
Keyword(s):
High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes)
◽
2015 ◽
Vol 19
(2)
◽
pp. 105-112
Keyword(s):
Structure and Electrical Property of CuInS2 Thin Films Deposited by DC Reactive Magnetron Sputtering
2011 ◽
Vol 26
(12)
◽
pp. 1287-1292
◽
2019 ◽
Vol 37
(2)
◽
pp. 021203
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