Structural and optical properties of nc-3C–SiC films synthesized by hot wire chemical vapor deposition from SiH4–C2H2–H2 mixture

2012 ◽  
Vol 522 ◽  
pp. 36-39 ◽  
Author(s):  
Honglie Shen ◽  
Tianru Wu ◽  
Yuanyuan Pan ◽  
Lei Zhang ◽  
Bin Cheng ◽  
...  
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