Transient stages during the chemical vapour deposition of silicon carbide from CH3SiCl3/H2: impact on the physicochemical and interfacial properties of the coatings
Keyword(s):
1996 ◽
Vol 13
(12)
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pp. 947-949
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Keyword(s):
1989 ◽
Vol 8
(3)
◽
pp. 321-325
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Keyword(s):
1993 ◽
Vol 2
(10)
◽
pp. 1330-1335
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