High-performance polycrystalline silicon thin-film transistors prepared via the laser crystallization of the prepatterned channel layer on the bottom-gate structure

2013 ◽  
Vol 529 ◽  
pp. 421-425 ◽  
Author(s):  
Chao-Lung Wang ◽  
I-Che Lee ◽  
Chun-Yu Wu ◽  
Yu-Ting Cheng ◽  
Po-Yu Yang ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
High Performance ◽  
Laser Crystallization ◽  
Silicon Thin Film ◽  
Channel Layer ◽  
Gate Structure ◽  
Bottom Gate

Development of high-performance polycrystalline silicon thin-film transistors (TFTs) using defect control process technologies

2002 ◽  
Vol 23 (7) ◽  
pp. 407-409 ◽  
Author(s):  
S. Higashi ◽  
D. Abe ◽  
Y. Hiroshima ◽  
K. Miyashita ◽  
T. Kawamura ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
High Performance ◽  
Control Process ◽  
Silicon Thin Film ◽  
Defect Control
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