Transparent conducting indium zinc tin oxide thin films with low indium content deposited by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2014.02.016 ◽

2014 ◽

Vol 559 ◽

pp. 44-48 ◽

Author(s):

Maryane Putri ◽

Chang Young Koo ◽

Jung-A Lee ◽

Jeong-Joo Kim ◽

Hee Young Lee

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Content ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Transparent Conducting ◽

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Structural and electrical properties of fluorine-doped zinc tin oxide thin films prepared by radio-frequency magnetron sputtering

Current Applied Physics ◽

10.1016/j.cap.2014.03.020 ◽

2014 ◽

Vol 14 (6) ◽

pp. 850-855 ◽

Author(s):

R. Pandey ◽

S.H. Cho ◽

D.K. Hwang ◽

W.K. Choi

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Structural And Electrical Properties ◽

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Highly Transparent Conducting Indium Tin Oxide Thin Films Prepared by Radio Frequency Magnetron Sputtering and Thermal Annealing

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2019.16242 ◽

2019 ◽

Vol 19 (3) ◽

pp. 1455-1462 ◽

Author(s):

Bhaskar Parida ◽

Youngun Gil ◽

Hyunsoo Kim

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Thermal Annealing ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Transparent Conducting

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(400)-Oriented indium tin oxide thin films with high mobility and figure of merit prepared by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2020.137972 ◽

2020 ◽

Vol 704 ◽

pp. 137972 ◽

Author(s):

Ajinkya Bhorde ◽

Ashok Jadhavar ◽

Ravindra Waykar ◽

Shruthi Nair ◽

Haribhau Borate ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Figure Of Merit ◽

High Mobility ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films

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Preparation and characterization of transparent conductive zinc doped tin oxide thin films prepared by radio-frequency magnetron sputtering

Journal of Wuhan University of Technology-Mater Sci Ed ◽

10.1007/s11595-011-0235-z ◽

2011 ◽

Vol 26 (3) ◽

pp. 388-392 ◽

Author(s):

Jiang Zhao ◽

Jiamiao Ni ◽

Xiujian Zhao ◽

Yuli Xiong

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films

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Crystallization of amorphous indium zinc oxide thin films produced by radio-frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2007.03.087 ◽

2008 ◽

Vol 516 (7) ◽

pp. 1374-1376 ◽

Author(s):

G. Gonçalves ◽

P. Barquinha ◽

L. Raniero ◽

R. Martins ◽

E. Fortunato

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Indium Zinc Oxide

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Optical properties of nano-structured zinc oxide thin films deposited by radio-frequency magnetron sputtering at different substrate temperatures

2012 IEEE Symposium on Humanities, Science and Engineering Research ◽

10.1109/shuser.2012.6268895 ◽

2012 ◽

Author(s):

I. Saurdi ◽

M. H. Mamat ◽

M. H. Abdullah ◽

A. Ishak ◽

M. Rusop

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Substrate Temperatures

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Tungsten Doped Indium Oxide Thin Films Deposited at Room Temperature by Radio Frequency Magnetron Sputtering

Journal of Material Science and Technology ◽

10.1016/j.jmst.2013.10.023 ◽

2014 ◽

Vol 30 (7) ◽

pp. 644-648 ◽

Author(s):

Jiaojiao Pan ◽

Wenwen Wang ◽

Dongqi Wu ◽

Qiang Fu ◽

Ding Ma

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Indium Oxide ◽

Room Temperature ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films

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Fluorine-doped ZnO transparent conducting thin films prepared by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2010.03.086 ◽

2010 ◽

Vol 518 (17) ◽

pp. 4955-4959 ◽

Author(s):

Yu-Zen Tsai ◽

Na-Fu Wang ◽

Chun-Lung Tsai

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Transparent Conducting ◽

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Preliminary studies on molybdenum-doped indium oxide thin films deposited by radio-frequency magnetron sputtering at room temperature

Thin Solid Films ◽

10.1016/j.tsf.2007.01.022 ◽

2007 ◽

Vol 515 (13) ◽

pp. 5512-5518 ◽

Author(s):

E. Elangovan ◽

A. Marques ◽

F.M. Braz Fernandes ◽

R. Martins ◽

E. Fortunato

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Indium Oxide ◽

Room Temperature ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films

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Morphology and structure evolution of tin-doped indium oxide thin films deposited by radio-frequency magnetron sputtering: The role of the sputtering atmosphere

Journal of Applied Physics ◽

10.1063/1.4871810 ◽

2014 ◽

Vol 115 (15) ◽

pp. 154905 ◽

Author(s):

Man Nie ◽

Tayfun Mete ◽

Klaus Ellmer

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Indium Oxide ◽

Radio Frequency Magnetron ◽

Structure Evolution ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Morphology And Structure

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