(400)-Oriented indium tin oxide thin films with high mobility and figure of merit prepared by radio frequency magnetron sputtering

2020 ◽  
Vol 704 ◽  
pp. 137972 ◽  
Author(s):  
Ajinkya Bhorde ◽  
Ashok Jadhavar ◽  
Ravindra Waykar ◽  
Shruthi Nair ◽  
Haribhau Borate ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Figure Of Merit ◽  
High Mobility ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Oxide Thin Films

Crystallization of amorphous indium zinc oxide thin films produced by radio-frequency magnetron sputtering

2008 ◽  
Vol 516 (7) ◽  
pp. 1374-1376 ◽  
Author(s):  
G. Gonçalves ◽  
P. Barquinha ◽  
L. Raniero ◽  
R. Martins ◽  
E. Fortunato
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Indium Zinc Oxide
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