Atomic layer deposition of high-quality Al2O3 and Al-doped TiO2 thin films from hydrogen-free precursors

2014 ◽  
Vol 565 ◽  
pp. 19-24 ◽  
Author(s):  
Lauri Aarik ◽  
Tõnis Arroval ◽  
Raul Rammula ◽  
Hugo Mändar ◽  
Väino Sammelselg ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Tio2 Thin Films ◽  
High Quality ◽  
Doped Tio2 ◽  
Layer Deposition

Phase-gradient atomic layer deposition of TiO2 thin films by plasma-induced local crystallization

2021 ◽  
Author(s):  
Dohyun Go ◽  
Jaehyeong Lee ◽  
Jeong Woo Shin ◽  
Sungje Lee ◽  
Wangu Kang ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Tio2 Thin Films ◽  
Phase Gradient ◽  
Layer Deposition

scholarly journals Quantifying the Extent of Ligand Incorporation and the Effect on Properties of TiO2 Thin Films Grown by Atomic Layer Deposition Using an Alkoxide or an Alkylamide

2020 ◽  
Vol 32 (4) ◽  
pp. 1393-1407
Author(s):  
Maxime E. Dufond ◽  
Maïmouna W. Diouf ◽  
Clémence Badie ◽  
Carine Laffon ◽  
Philippe Parent ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Tio2 Thin Films ◽  
Layer Deposition

Selection of post-growth treatment parameters for atomic layer deposition of structurally disordered TiO2 thin films

2008 ◽  
Vol 354 (2-9) ◽  
pp. 404-408 ◽  
Author(s):  
S. Dueñas ◽  
H. Castán ◽  
H. García ◽  
L. Bailón ◽  
K. Kukli ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Tio2 Thin Films ◽  
Layer Deposition ◽  
Selection Of

Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition

2009 ◽  
Vol 91 (3-4) ◽  
pp. 628-633 ◽  
Author(s):  
Chang-Soo Lee ◽  
Jungwon Kim ◽  
J.Y. Son ◽  
Wonyong Choi ◽  
Hyungjun Kim
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Polymer Substrate ◽  
Functional Coatings ◽  
Tio2 Thin Films ◽  
Layer Deposition

Atomic Layer Deposition, Characterization, and Growth Mechanistic Studies of TiO2 Thin Films

Langmuir ◽  
2014 ◽  
Vol 30 (25) ◽  
pp. 7395-7404 ◽  
Author(s):  
Mikko Kaipio ◽  
Timothee Blanquart ◽  
Yoann Tomczak ◽  
Jaakko Niinistö ◽  
Marco Gavagnin ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Mechanistic Studies ◽  
Tio2 Thin Films ◽  
Layer Deposition

Characterisation of epitaxial TiO2 thin films grown on MgO(001) using atomic layer deposition

2005 ◽  
Vol 285 (1-2) ◽  
pp. 208-214 ◽  
Author(s):  
D.R.G. Mitchell ◽  
D.J. Attard ◽  
G. Triani
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Tio2 Thin Films ◽  
Layer Deposition
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