scholarly journals Structural analysis of sputtered amorphous silica thin films: a Raman spectroscopy investigation

2021 ◽  
pp. 138811
Author(s):  
S. Ben Khemis ◽  
E. Burov ◽  
H. Montigaud ◽  
D. Skrelic ◽  
E. Gouillart ◽  
...  
Keyword(s):  
Thin Films ◽  
Raman Spectroscopy ◽  
Structural Analysis ◽  
Amorphous Silica ◽  
Silica Thin Films

Relationships between the solution and solid-state properties of solution-cast low-k silica thin films

2016 ◽  
Vol 18 (30) ◽  
pp. 20371-20380 ◽  
Author(s):  
Chao-Ching Chiang ◽  
Chien-You Su ◽  
An-Chih Yang ◽  
Ting-Yu Wang ◽  
Wen-Ya Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Solid State ◽  
Physical Properties ◽  
Amorphous Silica ◽  
Morphological Features ◽  
Silica Thin Films ◽  
Different Types ◽  
Solution Cast ◽  
Low K

This paper reports on the fabrication of low-k (amorphous) silica thin films cast from solutions without and with two different types of surfactants (TWEEN® 80 and Triton™ X-100) to elucidate the relationships between the structural/morphological features of the casting solutions and the physical properties of the resulting thin films.

Structural Analysis of GexAsySe1-x-yChalcogenide Glass Thin-Films by Raman Spectroscopy

2016 ◽  
Vol 53 (2) ◽  
pp. 023101
Author(s):  
李宬汉 Li Chenghan ◽  
王丽 Wang Li ◽  
甘渝林 Gan Yulin ◽  
苏雪琼 Su Xueqiong
Keyword(s):  
Thin Films ◽  
Raman Spectroscopy ◽  
Structural Analysis

Off-Stoichiometry Spectroscopic Investigations of Pure Amorphous Silica and N-Doped Silica Thin Films

2013 ◽  
Vol 117 (7) ◽  
pp. 3475-3482 ◽  
Author(s):  
M. Boffelli ◽  
M. Back ◽  
E. Cattaruzza ◽  
F. Gonella ◽  
E. Trave ◽  
...  
Keyword(s):  
Thin Films ◽  
Amorphous Silica ◽  
Spectroscopic Investigations ◽  
Silica Thin Films

scholarly journals Control of the intrinsic microstructure in AP-PECVD synthesised amorphous silica thin films

RSC Advances ◽  
2017 ◽  
Vol 7 (82) ◽  
pp. 52274-52282 ◽  
Author(s):  
F. M. Elam ◽  
B. C. A. M. van der Velden-Schuermans ◽  
S. A. Starostin ◽  
M. C. M. van de Sanden ◽  
H. W. de Vries
Keyword(s):  
Thin Films ◽  
Specific Energy ◽  
Amorphous Silica ◽  
Silica Thin Films ◽  
Silica Encapsulation

The lattice porosity of flexible silica encapsulation films can be regulated by varying the specific energy during the AP-PECVD process.

scholarly journals Diffusion of Oxygen Molecules in Amorphous Silica Thin Films

1990 ◽  
Vol 54 (2) ◽  
pp. 193-200 ◽  
Author(s):  
Masahiro Susa ◽  
Hideyuki Shinohara ◽  
Kazuhiro Nagata ◽  
Kazuhiro S. Goto
Keyword(s):  
Thin Films ◽  
Amorphous Silica ◽  
Silica Thin Films
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