Control of the intrinsic microstructure in AP-PECVD synthesised amorphous silica thin films
Keyword(s):
The lattice porosity of flexible silica encapsulation films can be regulated by varying the specific energy during the AP-PECVD process.
Keyword(s):
2016 ◽
Vol 18
(30)
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pp. 20371-20380
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2013 ◽
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pp. 3475-3482
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1990 ◽
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pp. 193-200
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pp. 256-265
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2006 ◽
Vol 114
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pp. 517-523
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