Improving displacement measurement accuracy by compensating for camera motion and thermal effect on camera sensor

2022 ◽  
Vol 167 ◽  
pp. 108525
Author(s):  
Lei Xing ◽  
Wujiao Dai ◽  
Yunsheng Zhang
Keyword(s):  
Thermal Effect ◽  
Measurement Accuracy ◽  
Displacement Measurement ◽  
Camera Motion ◽  
Camera Sensor

Signal Sampling and Accuracy Analysis of Large Gear’s Angular Displacement Measuring its Deviation On-Machine

2011 ◽  
Vol 189-193 ◽  
pp. 4201-4204
Author(s):  
Jia Qi Jin ◽  
Hui Li
Keyword(s):  
Measurement Accuracy ◽  
Angular Displacement ◽  
Total Error ◽  
Measuring Method ◽  
Displacement Measurement ◽  
Signal Acquisition ◽  
Accuracy Analysis ◽  
Friction Disc ◽  
Large Gear ◽  
Circular Grating

To solve the critical problem of large gear deviation on-machine: angle displacement measurement that is how to get signal acquisition and accuracy analysis of angle displacement. A new measuring method is proposed, which applies the dividing mechanism (it is composed of friction disc and circular grating) to ensure index and pick up signal of gear corner correctly and strictly according to the principle of angular displacement measurement. Furthermore, the main error which affects measurement accuracy is analyzed, and accuracy is analyzed with geometrical theory such as Fourier series and error synthesis principle etc. The experimental results indicate that angel dividing and signal samplings are easier and more efficient by the dividing mechanism, furthermore, the accuracy is in the range of total error that is permitted by verification, and the mechanism can also meet the requirement of high accuracy, so the method is significance that assessing transmission accuracy of involutes gear.

scholarly journals Design and Testing of Inertial System for Landslide Displacement Distribution Measurement

Sensors ◽  
2020 ◽  
Vol 20 (24) ◽  
pp. 7154
Author(s):  
Yongquan Zhang ◽  
Huiming Tang ◽  
Guiying Lu ◽  
Yuansheng Wang ◽  
Changdong Li ◽  
...  
Keyword(s):  
Pitch Angle ◽  
Measurement Accuracy ◽  
Measurement Instrument ◽  
Deformation Monitoring ◽  
Displacement Measurement ◽  
Roll Angle ◽  
Lateral Direction ◽  
Landslide Evolution ◽  
Gravity Platform ◽  
And Control

Landslide displacement monitoring plays a fundamental role in the study of landslide evolution mechanisms, forecasting, risk assessment, prevention, and control. To fill the deficiencies of traditional instrumentation for measuring landslide displacement distributed along lateral direction, a landslide displacement measurement method based on deformation-coupled pipeline trajectory measurement is proposed, and a pipeline trajectory inertial measurement instrument is developed. The developed instrument, primarily comprised of a single shaft gyro, two axis accelerometers, and an external roller encoder, is designed as an axial half strapdown-radial half platform structure combined with a mechanical gravity platform. This structure avoids the singularity of pitch angle and roll angle and can expediently calculate a pipeline trajectory with an Eulerian transformation when obtaining several basic physical variables, e.g., the axial linear velocity, pitch angle, roll angle, and azimuth angle. Additionally, the pipeline trajectory, measured at different times, possesses the ability to reflect the displacement evolution feature of landslides. The results of prototype simulation tests imply a single measurement accuracy of a 12 cm/100 m span and a singly periodic multiple (more than five times) measurement accuracy of a 3 cm/100 m span, which meets medium-precision displacement measurement requirements for a landslide. Additionally, the finished instrument has been successfully applied to the deformation monitoring of the Majiagou I# landslide, which further verifies its feasibility and offers a reference for similar landslides.

Nano-Pattern Recognition and Correlation Technique for Nano-Scale Deformation Measurement

2007 ◽  
Author(s):  
Hongbo Bi ◽  
Chris Hartsough ◽  
Bongtae Han
Keyword(s):  
Pattern Recognition ◽  
Measurement Accuracy ◽  
Displacement Measurement ◽  
Correlation Technique ◽  
Technical Procedure ◽  
Before And After ◽  
High Measurement ◽  
Single Pattern ◽  
Plane Displacement ◽  
Low K

The foundation and technical procedure of Nano-Pattern Recognition and Correlation Technique (N-PRCT) is described. The proposed technique is an in-plane displacement measurement technique that is based on regularly oriented structures. Displacement is obtained by tracking the movement of each single pattern in the images taken before and after loading (deformation) through techniques of pattern recognition and correlation. The proposed technique is insensitive to the noise involved in the digital images which comes inherently from the SEM imaging process; this results in high measurement accuracy. The technique provides the spatial resolution of less than 5 nm/pixel and displacement measurement accuracy of approximately 0.1 nm, which will be suited ideally for thermal deformation measurements of Low-K layer.

scholarly journals CPLD-Based Displacement Measurement System for Nanoscale Grating Ruler

2020 ◽  
Vol 2020 ◽  
pp. 1-8
Author(s):  
Jiyuan Sun ◽  
Chunlin Tian
Keyword(s):  
High Precision ◽  
Measurement System ◽  
Measurement Accuracy ◽  
Displacement Measurement ◽  
Measurement Technology ◽  
Precision Manufacturing ◽  
High Precision Measurement ◽  
Measurement Control ◽  
High Measurement ◽  
The Times

With the continuous development of science and technology, industrial production has higher and higher requirements for precision. Many high-precision measurement technologies emerge as the times require, and nanoscale grating ruler displacement measurement technology is one of them. As a kind of precision sensor, nanoscale grating ruler has important application in displacement measurement system. CPLD has the advantages of high integration and fast programming speed, which is often used to control the displacement measurement system of nanoscale grating ruler. The purpose of this paper is to deeply explore the measurement effect and related application principle of nanoscale grating ruler displacement measurement system based on CPLD technology. A set of nanoscale grating ruler displacement measurement system is designed based on CPLD technology. The output signal of grating ruler is programmed by CPLD. The x-axis displacement of the experimental platform controlled by stepping motor is measured, and the measured data are recorded by carrying out analysis and research. The results show that compared with the traditional phase difference measurement system, the measurement accuracy of the system based on CPLD is improved by 24.7%, the robustness of the measurement system is improved by 18.6%, and the measurement speed is increased by 27.3%. Therefore, this kind of nanoscale measurement precision grating ruler displacement measurement control system based on CPLD has three characteristics: high measurement accuracy, strong anti-interference ability, and high measurement motion efficiency, which can effectively meet the requirements of grating ruler displacement measurement system for high-precision manufacturing technology.

scholarly journals Displacement Measurement Method Based on the Rotating Paraboloid Array

2019 ◽  
Vol 9 (16) ◽  
pp. 3315
Author(s):  
Zekui Lv ◽  
Zhikun Su ◽  
Dong Zhang ◽  
Zhiming Yang ◽  
Xiaohuan Yang ◽  
...  
Keyword(s):  
Measurement System ◽  
Measurement Accuracy ◽  
Measurement Range ◽  
Displacement Measurement ◽  
Freeform Surface ◽  
Research Focus ◽  
Potential Applicability ◽  
Discrete Manner ◽  
Straightness Error ◽  
Optical Structure

Using an optical freeform surface to realize the precision measurement of displacement has become a research focus in the present day. However, the measurement range of this method is limited by the size of the freeform surface processed. In order to overcome this difficulty, this paper presents a two-dimensional displacement measurement system with a large range, which is composed of a slope sensor and a rotating paraboloid array. The slope sensor utilizes the optical structure of an autocollimator with minor optimization, and the rotating paraboloid array expands the measurement range of the system in a discrete manner. The experimental results showed that the optimized optical system enhanced the measurement accuracy to ±0.4 μm within the range of 1500 μm and the overall measurement error was approximately ±2 μm when measured within the range of 450 mm. The developed measurement system has potential applicability for detection of errors, such as the position error and straightness error of multi-axis systems.

Error Separation and Dynamic Compensation Method in Coplanar Planar Grating Displacement Measurement System

2014 ◽  
Vol 613 ◽  
pp. 43-50
Author(s):  
Yong Meng Liu ◽  
Mao Qiang Yuan ◽  
Jie Ru Cao ◽  
Jing Ma ◽  
Jiu Bin Tan
Keyword(s):  
Measurement System ◽  
Manufacturing Industry ◽  
Measurement Accuracy ◽  
Grating Period ◽  
Compensation Method ◽  
Displacement Measurement ◽  
Dynamic Compensation ◽  
Error Separation ◽  
Software Analysis ◽  
Vibration Effect

To improve the measurement accuracy of two-dimensional (2D) precision working stages in the semiconductor manufacturing industry, an error separation and dynamic compensation method based on a planar grating is proposed for a 2D coplanar displacement measurement system. In the system, a planar grating of HEIDENHAIN PP281R is fixed in the center of precision working stage to build coplanar structure and reduce Abbe errors. And the system errors including grating period carved error, temperature effect, vibration effect and mount effect are modeled, calculated and separated. Then the separated errors are dynamically compensated from the corresponding displacement measurement results through data-processing software. Analysis results show that the proposed error separation and dynamic compensation method based on planar grating can improve the measurement accuracy of the coplanar displacement measurement system effectively.

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