Displacement Measurement Method Based on the Rotating Paraboloid Array

Using an optical freeform surface to realize the precision measurement of displacement has become a research focus in the present day. However, the measurement range of this method is limited by the size of the freeform surface processed. In order to overcome this difficulty, this paper presents a two-dimensional displacement measurement system with a large range, which is composed of a slope sensor and a rotating paraboloid array. The slope sensor utilizes the optical structure of an autocollimator with minor optimization, and the rotating paraboloid array expands the measurement range of the system in a discrete manner. The experimental results showed that the optimized optical system enhanced the measurement accuracy to ±0.4 μm within the range of 1500 μm and the overall measurement error was approximately ±2 μm when measured within the range of 450 mm. The developed measurement system has potential applicability for detection of errors, such as the position error and straightness error of multi-axis systems.

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CPLD-Based Displacement Measurement System for Nanoscale Grating Ruler

Journal of Chemistry ◽

10.1155/2020/5142892 ◽

2020 ◽

Vol 2020 ◽

pp. 1-8

Author(s):

Jiyuan Sun ◽

Chunlin Tian

Keyword(s):

High Precision ◽

Measurement System ◽

Measurement Accuracy ◽

Displacement Measurement ◽

Measurement Technology ◽

Precision Manufacturing ◽

High Precision Measurement ◽

Measurement Control ◽

High Measurement ◽

The Times

With the continuous development of science and technology, industrial production has higher and higher requirements for precision. Many high-precision measurement technologies emerge as the times require, and nanoscale grating ruler displacement measurement technology is one of them. As a kind of precision sensor, nanoscale grating ruler has important application in displacement measurement system. CPLD has the advantages of high integration and fast programming speed, which is often used to control the displacement measurement system of nanoscale grating ruler. The purpose of this paper is to deeply explore the measurement effect and related application principle of nanoscale grating ruler displacement measurement system based on CPLD technology. A set of nanoscale grating ruler displacement measurement system is designed based on CPLD technology. The output signal of grating ruler is programmed by CPLD. The x-axis displacement of the experimental platform controlled by stepping motor is measured, and the measured data are recorded by carrying out analysis and research. The results show that compared with the traditional phase difference measurement system, the measurement accuracy of the system based on CPLD is improved by 24.7%, the robustness of the measurement system is improved by 18.6%, and the measurement speed is increased by 27.3%. Therefore, this kind of nanoscale measurement precision grating ruler displacement measurement control system based on CPLD has three characteristics: high measurement accuracy, strong anti-interference ability, and high measurement motion efficiency, which can effectively meet the requirements of grating ruler displacement measurement system for high-precision manufacturing technology.

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The Triaxial Angular Rate Measurement System Based on Two MEMS Accelerometers Used for Rotating Carrier

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.609-610.1219 ◽

2014 ◽

Vol 609-610 ◽

pp. 1219-1225

Author(s):

Xiao Ming Zhang ◽

Dai Di Zhao ◽

Jian Yu Shang ◽

Xing Cui ◽

Jun Liu

Keyword(s):

Measurement System ◽

Measurement Accuracy ◽

Physical Simulation ◽

Angular Rate ◽

Measurement Range ◽

Small Range ◽

Rate Measurement ◽

Mechanics Model ◽

Mems Accelerometers ◽

Large Measurement

Considering that the MEMS Gyroscope used in rotating carrier has the problems of small range and low measurement accuracy, the tri-axial angular rate measurement system based on two MEMS accelerometers used for rotating carrier was presented in this paper. The system has the advantages of large measurement range, anti-high overload, simple structure, small volume and low price. From the principle of the tri-axial angular rate measurement system, the mathematical model of the system was established and the mechanics model of the system was discussed. The different processing method of the output signal in each condition was summarized based on the mechanics model. Finally, the semi-physical simulation experiment was done to verify these theories. The experimental results show that the system scheme is feasible and has obvious advantages in the range and measurement accuracy.

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A Novel 2D Micro-Displacement Measurement Method Based on the Elliptical Paraboloid

Applied Sciences ◽

10.3390/app9122517 ◽

2019 ◽

Vol 9 (12) ◽

pp. 2517 ◽

Cited By ~ 4

Author(s):

Zekui Lv ◽

Xinghua Li ◽

Zhikun Su ◽

Dong Zhang ◽

Xiaohuan Yang ◽

...

Keyword(s):

Measurement System ◽

Measurement Method ◽

Two Dimensions ◽

Displacement Measurement ◽

Numerical Control ◽

Surface Measurement ◽

Technology Application ◽

Wide Range ◽

Potential Applicability ◽

Elliptical Paraboloid

The micro-displacement measurement system with 2D/3D has become increasingly important in the field of scientific research and technology application. In order to explore the application of an optical surface in micro-displacement measurement, a novel and simple 2D micro-displacement measurement method based on the elliptical paraboloid was designed and subjected to experiment. The measurement system takes advantage of the elliptical paraboloid instead of a plane mirror in the optical structure of an autocollimator which has been ameliorated to adapt to curved surface measurement. Through the displacement of the light spot on the CCD (Charge Coupled Device) detector, the displacement of the target could be measured with a linear correlation coefficient of 0.9999. The accuracy of the system is about ± 0.3 μm in a wide range in two dimensions. The results were in good agreement with the theoretical analysis and indicated the potential applicability of the proposed system in the detection of geometric errors of CNC (Computerized Numerical Control) machine tools.

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Three-Dimensional Measurement System Based on Line Laser

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.333-335.32 ◽

2013 ◽

Vol 333-335 ◽

pp. 32-36

Author(s):

Le Wen Yu ◽

Da Zhang ◽

Yuan Sheng Zhang

Keyword(s):

Mathematical Model ◽

Measurement System ◽

Measurement Accuracy ◽

Three Dimensional ◽

Measurement Range ◽

Laser Triangulation ◽

Depth Information ◽

Dimensional Measurement ◽

Three Dimensional Measurement ◽

On Line

This paper puts forward a three-dimensional measurement system based on line laser, describing its operating principle. Extracted the light stripes center by image processing technology, and establishing mathematical model, detecting the depth information by the method of laser triangulation, and reconstructed the three-dimensional form of object. The experimental results indicate that measurement accuracy less than ±0.03mm when the measurement range between 0mm to 10mm.

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Error Separation and Dynamic Compensation Method in Coplanar Planar Grating Displacement Measurement System

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.613.43 ◽

2014 ◽

Vol 613 ◽

pp. 43-50

Author(s):

Yong Meng Liu ◽

Mao Qiang Yuan ◽

Jie Ru Cao ◽

Jing Ma ◽

Jiu Bin Tan

Keyword(s):

Measurement System ◽

Manufacturing Industry ◽

Measurement Accuracy ◽

Grating Period ◽

Compensation Method ◽

Displacement Measurement ◽

Dynamic Compensation ◽

Error Separation ◽

Software Analysis ◽

Vibration Effect

To improve the measurement accuracy of two-dimensional (2D) precision working stages in the semiconductor manufacturing industry, an error separation and dynamic compensation method based on a planar grating is proposed for a 2D coplanar displacement measurement system. In the system, a planar grating of HEIDENHAIN PP281R is fixed in the center of precision working stage to build coplanar structure and reduce Abbe errors. And the system errors including grating period carved error, temperature effect, vibration effect and mount effect are modeled, calculated and separated. Then the separated errors are dynamically compensated from the corresponding displacement measurement results through data-processing software. Analysis results show that the proposed error separation and dynamic compensation method based on planar grating can improve the measurement accuracy of the coplanar displacement measurement system effectively.

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A Simple and Long-Range Displacement Measurement System

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.341-342.839 ◽

2013 ◽

Vol 341-342 ◽

pp. 839-842

Author(s):

Ye Hu ◽

Qian Hui Zhao ◽

Yong Ming Chen ◽

Lei Wang

Keyword(s):

Long Range ◽

Measurement System ◽

Simple Structure ◽

Measurement Range ◽

Displacement Measurement ◽

Linear Scale ◽

Simulation Experiments ◽

Repeatability Error ◽

Linearity Error ◽

Accuracy Performance

This paper introduces a well-used long range displacement measurement system. The advantages of the system are that the sensor's measurement range can be extended by optical linear scale with a simple structure, and the distance between the measured object and the sensor can be automatically adjusted. The feasibility of the measurement system is tested by simulation experiments, and the accuracy performance is evaluated with respect to both repeatability error and linearity error. The experimental results show that the displacement measurement system reaches a level of accuracy which is sufficient for operational requirements.

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