Experimental verification of three-dimensional simulations of LTO layer deposition on structures prepared by anisotropic wet etching of silicon
Keyword(s):
2002 ◽
Vol 3
(2)
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pp. 53-58
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Keyword(s):
2011 ◽
Vol 733
(1)
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pp. 17
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1995 ◽
Vol 100
(A12)
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pp. 23779
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