The PROMPT project and its application to the three-dimensional simulation of low-pressure chemical vapor deposition processes
2000 ◽
Vol 50
(1-4)
◽
pp. 481-486
◽
1988 ◽
Vol 135
(7)
◽
pp. 1832-1836
◽
2002 ◽
Vol 12
(4)
◽
pp. 69-74
◽
Keyword(s):
Keyword(s):
2017 ◽
Vol 19
(8)
◽
pp. 1700193
◽
Keyword(s):