A new class of Ti–Si–C–N coatings obtained by chemical vapor deposition — part II: low-temperature process
Keyword(s):
2016 ◽
Vol 16
(5)
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pp. 5285-5290
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High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
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2006 ◽
Vol 10
(3)
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pp. 457-466
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Keyword(s):
Keyword(s):
2002 ◽
Vol 361
(3-4)
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pp. 189-195
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