Low temperature zirconia thin film synthesis by a chemical vapour deposition process involving ZrCl4 and O2–H2–Ar microwave post-discharges. Comparison with a conventional CVD hydrolysis process

1997 ◽  
Vol 301 (1-2) ◽  
pp. 35-44 ◽  
Author(s):  
J. Gavillet ◽  
T. Belmonte ◽  
D. Hertz ◽  
H. Michel
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Deposition Process ◽  
Chemical Vapour Deposition Process ◽  
Hydrolysis Process ◽  
Zirconia Thin Film ◽  
Film Synthesis

A chemical vapour deposition process for the production of carbon nanospheres

Carbon ◽  
2001 ◽  
Vol 39 (4) ◽  
pp. 621-626 ◽  
Author(s):  
Ph. Serp ◽  
R. Feurer ◽  
Ph. Kalck ◽  
Y. Kihn ◽  
J.L. Faria ◽  
...  
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Deposition Process ◽  
Carbon Nanospheres ◽  
Chemical Vapour Deposition Process
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