The Performance of a Thermal Field Emission Gun
Although the "cold" field emission gun has been used successfully for both transmission and scanning electron microscopy it requires ultra-high vacuum which is not obtained easily when such a gun is interfaced to a conventional microscope system. Recently, the "thermal" field emission gun (TFEG) in which the emitting tip is held at around 1700°K has been proposed as an alternative electron source for such applications. Under this condition the tip is cleaned continuously, and surface asperities are smoothed, therefore stable operation is possible in a high vacuum. In this paper we report on the build-up characteristics, current stability and brightness of a TFEG which has been interfaced to a JEOL JEM 100B microscope equipped with a scanning attachment. The gun consists of a (111) tungsten emitter set on a rhenium filament, three anodes and a two stage magnetic alignment system. The gun chamber is ion pumped to a pressure in the range 6xl0-8 to 2xl0-9 torr.