Reduced bias synthesis of cubic boron nitride thin films by magnetically enhanced inductively coupled radio frequency plasma chemical vapor deposition
2003 ◽
Vol 57
(8)
◽
pp. 1459-1463
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1996 ◽
Vol 67
(4)
◽
pp. 1542-1545
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1989 ◽
Vol 7
(3)
◽
pp. 2325-2327
◽
1997 ◽
Vol 36
(Part 1, No. 7B)
◽
pp. 4893-4896
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2008 ◽
Vol 8
(9)
◽
pp. 4662-4665
◽
Selective growth of CNT by using triode-type radio frequency plasma chemical vapor deposition method
2007 ◽
Vol 16
(4-7)
◽
pp. 1106-1109
◽