Thickness determination of thin polycrystalline film by grazing incidence X-ray diffraction

2001 ◽  
Vol 148 (1) ◽  
pp. 95-100 ◽  
Author(s):  
J. Lhotka ◽  
R. Kužel ◽  
G. Cappuccio ◽  
V. Valvoda
2010 ◽  
Vol 163 ◽  
pp. 9-12 ◽  
Author(s):  
S.J. Skrzypek ◽  
M. Goły ◽  
J. Kowalska ◽  
K. Chruściel

Electrodeposition and other methods are employed to obtain metallic films and coatings. Copper coatings are most extensively used in circuit board industry and often as a base to further formation of other metallic films. Electrodeposited copper films (thin layers) are widely used in electronic and automotive industry so its electrical and mechanical properties and its thickness are important. Several methods are used for thickness determination of thin films and coatings for example mechanical, magnetic and ball crater with light microscopy methods. They are destructive and not precise enough. The X-ray fluorescence, absorption and diffraction are more frequently used due to better precision. Although they are complex and expensive, they pronounce an important feature like non-destructive character. For particular cases geometrical conditions and mathematical calculation procedure must be elaborated. An application of X-ray diffraction in grazing incidence angle for thickness determination is described in this article. The method is based on absorption principles of X-ray beam. The absorption is proportional to thickness of the coating and to incidence and to the diffraction angle which. Geometrical conditions were obtained experimentally and suitable mathematical calculations were introduced. The elaborated methodical approach was applied to thickness determination of copper coatings electrodeposited on a brass substrate.


1994 ◽  
Vol 89 (7) ◽  
pp. 583-586 ◽  
Author(s):  
Toshihiro Shimada ◽  
Yukito Furukawa ◽  
Etsuo Arakawa ◽  
Kunikazu Takeshita ◽  
Tadashi Matsushita ◽  
...  

1997 ◽  
Vol 30 (1-2) ◽  
pp. 71-79 ◽  
Author(s):  
Liu Yu-Shu ◽  
Zhao Yu

A simple and convenient X-ray diffraction method is proposed to determine the thickness of surface film for textured specimens. The analysis result for a synthetic specimen with surface film has proved that the method is applicable and reliable.


2007 ◽  
Vol 22 (4) ◽  
pp. 319-323 ◽  
Author(s):  
Jianfeng Fang ◽  
Jing Huo ◽  
Jinyuan Zhang ◽  
Yi Zheng

The structure of a chemical-vapor-deposited (CVD) diamond thin film on a Mo substrate was studied using quasi-parallel X-ray and glancing incidence techniques. Conventional X-ray diffraction analysis revealed that the sample consists of a diamond thin film, a Mo2C transition layer, and Mo substrate. The Mo2C transition layer was formed by a chemical reaction between the diamond film and the Mo substrate during the CVD process. A method for layer-thickness determination of the thin film and the transition layer was developed. This method was based on a relationship between X-ray diffraction intensities from the transition layer or its substrate and a function of grazing incidence angles. Results of glancing incidence X-ray diffraction analysis showed that thicknesses of the diamond thin film and the Mo2C transition layer were determined successfully with high precision.


Hyomen Kagaku ◽  
2016 ◽  
Vol 37 (9) ◽  
pp. 429-434 ◽  
Author(s):  
Ryohei TSURUTA ◽  
Yuta MIZUNO ◽  
Takuya HOSOKAI ◽  
Tomoyuki KOGANEZAWA ◽  
Hisao ISHII ◽  
...  

2004 ◽  
Vol 36 (1-3) ◽  
pp. 11-19 ◽  
Author(s):  
M. Sztucki ◽  
T.U. Schülli ◽  
T.H. Metzger ◽  
E. Beham ◽  
D. Schuh ◽  
...  

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