Thermo-mechanical behavior of thick PECVD oxide films for power MEMS applications

2003 ◽  
Vol 103 (1-2) ◽  
pp. 263-270 ◽  
Author(s):  
Xin Zhang ◽  
Kuo-Shen Chen ◽  
S. Mark Spearing
Keyword(s):  
Mechanical Behavior ◽  
Oxide Films ◽  
Power Mems

scholarly journals Gas Permeation, Mechanical Behavior and Cytocompatibility of Ultrathin Pure and Doped Diamond-Like Carbon and Silicon Oxide Films

Coatings ◽  
2013 ◽  
Vol 3 (4) ◽  
pp. 268-300 ◽  
Author(s):  
Juergen Lackner ◽  
Claudia Meindl ◽  
Christian Wolf ◽  
Alexander Fian ◽  
Clemens Kittinger ◽  
...  
Keyword(s):  
Mechanical Behavior ◽  
Silicon Oxide ◽  
Oxide Films ◽  
Gas Permeation ◽  
Diamond Like Carbon

Processing of Thick Dielectric Films for Power MEMS: Stress and Fracture

2000 ◽  
Vol 657 ◽  
Author(s):  
Kuo-Shen Chen ◽  
Xin Zhang ◽  
S. Mark Spearing
Keyword(s):  
Residual Stress ◽  
Oxide Films ◽  
Intrinsic Stress ◽  
Dielectric Films ◽  
Mixed Mode Fracture ◽  
Strong Function ◽  
Deformation And Fracture ◽  
Power Mems ◽  
Theoretical Predictions ◽  
Critical Cracking Temperature

ABSTRACTThis paper presents residual stress characterization and fracture analysis of thick silane based PECVD oxide films. The motivation for this work is to elucidate the factors contributing to residual stress, deformation and fracture of oxide films so as to refine the fabrication process for power MEMS. It is shown that residual stress in oxide films strongly depended on thermal processing history. Dissolved gases were found to play an important role in governing intrinsic stress. The tendency to form cracks is a strong function of film thickness and annealing temperature. Mixed mode fracture mechanics was applied to predict critical cracking temperature, and there is a fairly good match between theoretical predictions and experimental observations.

Application of TEM to Deformation, Wear, and Fracture of Ceramics

1974 ◽  
Vol 32 ◽  
pp. 472-473
Author(s):  
B. J. Hockey
Keyword(s):  
Wear Resistance ◽  
High Temperature ◽  
Mechanical Behavior ◽  
Brittle Materials ◽  
High Temperature Strength ◽  
Wide Range ◽  
Corrosive Environments ◽  
Further Development

Ceramics, such as Al2O3 and SiC have numerous current and potential uses in applications where high temperature strength, hardness, and wear resistance are required often in corrosive environments. These materials are, however, highly anisotropic and brittle, so that their mechanical behavior is often unpredictable. The further development of these materials will require a better understanding of the basic mechanisms controlling deformation, wear, and fracture.The purpose of this talk is to describe applications of TEM to the study of the deformation, wear, and fracture of Al2O3. Similar studies are currently being conducted on SiC and the techniques involved should be applicable to a wide range of hard, brittle materials.

Resolving Crystallites in Zirconium Oxide Films

1969 ◽  
Vol 27 ◽  
pp. 140-141
Author(s):  
R.A. Ploc
Keyword(s):  
Electron Microscope ◽  
Inelastic Scattering ◽  
Zirconium Oxide ◽  
Oxide Films ◽  
Optic Axis ◽  
Objective Lens ◽  
Microscope Objective ◽  
Linear Optic ◽  
A Current ◽  
Microscope Objective Lens

The optic axis of an electron microscope objective lens is usually assumed to be straight and co-linear with the mechanical center. No reason exists to assume such perfection and, indeed, simple reasoning suggests that it is a complicated curve. A current centered objective lens with a non-linear optic axis when used in conjunction with other lenses, leads to serious image errors if the nature of the specimen is such as to produce intense inelastic scattering.

Analysis of Sputtered Zinc Oxide Films

1980 ◽  
Vol 38 ◽  
pp. 416-417
Author(s):  
T. A. Emma ◽  
M. P. Singh
Keyword(s):  
Electron Microscopy ◽  
Zinc Oxide ◽  
Piezoelectric Materials ◽  
Oxide Films ◽  
Optical Quality ◽  
Zno Films ◽  
Rf Power ◽  
X Ray Diffraction ◽  
Sputtered Films ◽  
Zinc Oxide Films

Optical quality zinc oxide films have been characterized using reflection electron diffraction (RED), replication electron microscopy (REM), scanning electron microscopy (SEM), and X-ray diffraction (XRD). Significant microstructural differences were observed between rf sputtered films and planar magnetron rf sputtered films. Piezoelectric materials have been attractive for applications to integrated optics since they provide an active medium for signal processing. Among the desirable physical characteristics of sputtered ZnO films used for this and related applications are a highly preferred crystallographic texture and relatively smooth surfaces. It has been found that these characteristics are very sensitive to the type and condition of the substrate and to the several sputtering parameters: target, rf power, gas composition and substrate temperature.

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