Analysis of surface acoustic wave pressure sensors

2005 ◽  
Vol 118 (1) ◽  
pp. 1-5 ◽  
Author(s):  
Q JIANG ◽  
X YANG ◽  
H ZHOU ◽  
J YANG
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Pressure Sensors ◽  
Wave Pressure

Highly sensitive thick diaphragm-based surface acoustic wave pressure sensor

2021 ◽  
pp. 112935
Author(s):  
Maria Muzamil Memon ◽  
Shuliang Pan ◽  
Jiang Wan ◽  
Tao Wang ◽  
Wanli Zhang
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Pressure Sensor ◽  
Wave Pressure ◽  
Highly Sensitive

scholarly journals Circuit Design of Surface Acoustic Wave Based Micro Force Sensor

2014 ◽  
Vol 2014 ◽  
pp. 1-9
Author(s):  
Yuanyuan Li ◽  
Wenke Lu ◽  
Changchun Zhu ◽  
Qinghong Liu ◽  
Haoxin Zhang ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Circuit Design ◽  
Force Measurement ◽  
Pressure Sensors ◽  
Force Sensor ◽  
Piezoresistive Sensor ◽  
Detection Circuit ◽  
Micro Force Sensor ◽  
The Stability

Pressure sensors are commonly used in industrial production and mechanical system. However, resistance strain, piezoresistive sensor, and ceramic capacitive pressure sensors possess limitations, especially in micro force measurement. A surface acoustic wave (SAW) based micro force sensor is designed in this paper, which is based on the theories of wavelet transform, SAW detection, and pierce oscillator circuits. Using lithium niobate as the basal material, a mathematical model is established to analyze the frequency, and a peripheral circuit is designed to measure the micro force. The SAW based micro force sensor is tested to show the reasonable design of detection circuit and the stability of frequency and amplitude.

ZnO/quartz structure potentiality for surface acoustic wave pressure sensor

2006 ◽  
Vol 128 (1) ◽  
pp. 78-83 ◽  
Author(s):  
A. Talbi ◽  
F. Sarry ◽  
M. Elhakiki ◽  
L. Le Brizoual ◽  
O. Elmazria ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Pressure Sensor ◽  
Wave Pressure
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