Electrical properties of reactively sputtered WO3 thin films as ozone gas sensor

2002 ◽  
Vol 84 (1) ◽  
pp. 1-5 ◽  
Author(s):  
K Aguir ◽  
C Lemire ◽  
D.B.B Lollman
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Gas Sensor ◽  
Wo3 Thin Films

Characterization of photochemically grown Pd loaded WO3 thin films and its evaluation as ammonia gas sensor

2020 ◽  
Vol 825 ◽  
pp. 154166 ◽  
Author(s):  
C. Castillo ◽  
G. Cabello ◽  
B. Chornik ◽  
Y. Huentupil ◽  
G.E. Buono-Core
Keyword(s):  
Thin Films ◽  
Gas Sensor ◽  
Ammonia Gas ◽  
Wo3 Thin Films

Investigation of structural and electrical properties of pristine and 200 MeV Ag15+ ion irradiated 3 wt% ‘Li’ doped WO3 thin films

2019 ◽  
Vol 93 (12) ◽  
pp. 1559-1565
Author(s):  
R. Rathika ◽  
M. Kovendhan ◽  
D. Paul Joseph ◽  
C. Venkateswaran ◽  
K. Asokan ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Structural And Electrical Properties ◽  
Wo3 Thin Films

Structural and optical characterization of WO3 thin films for gas sensor applications

2005 ◽  
Vol 97 (9) ◽  
pp. 093527 ◽  
Author(s):  
E. György ◽  
G. Socol ◽  
I. N. Mihailescu ◽  
C. Ducu ◽  
S. Ciuca
Keyword(s):  
Thin Films ◽  
Gas Sensor ◽  
Optical Characterization ◽  
Sensor Applications ◽  
Wo3 Thin Films

Study of Structural, Morphological and Electrical Properties of WO3 Thin Films by e-beam Technique

2017 ◽  
Vol 7 (11) ◽  
pp. 405-413
Author(s):  
Madhukar P ◽  
Shanmukhi Jyothi D. ◽  
Jayababu N. ◽  
Ramana Reddy M.V.
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Wo3 Thin Films ◽  
Beam Technique

Conventional Gas Sensor Application of Nanostructured WO3 Thin Films

2015 ◽  
Vol 13 (11) ◽  
pp. 917-924 ◽  
Author(s):  
J. M. Patil ◽  
S. B. Patil ◽  
R. H. Bari ◽  
A. N. Sonar
Keyword(s):  
Thin Films ◽  
Gas Sensor ◽  
Sensor Application ◽  
Wo3 Thin Films

Preparation and characterization of an optically-detectable hydrogen gas sensor consisting of Pd/WO3 thin films

1993 ◽  
Vol 14 (1-3) ◽  
pp. 547-548 ◽  
Author(s):  
Yong-su Oh ◽  
Junichi Hamagami ◽  
Yuichi Watanabe ◽  
Masasuke Takata
Keyword(s):  
Thin Films ◽  
Gas Sensor ◽  
Hydrogen Gas ◽  
Wo3 Thin Films

Hall Coefficient Determination and Electrical Properties of Chemical Bath-Deposited n-WO3 Thin Films

2015 ◽  
Vol 44 (4) ◽  
pp. 1110-1115 ◽  
Author(s):  
Ifeanyichukwu C. Amaechi ◽  
Assumpta C. Nwanya ◽  
Paul U. Asogwa ◽  
Rose U. Osuji ◽  
Malik Maaza ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Hall Coefficient ◽  
Wo3 Thin Films

scholarly journals Tungsten Oxide Based Hydrogen Gas Sensor Prepared by Advanced Magnetron Sputtering

2021 ◽  
Vol 6 (1) ◽  
pp. 5
Author(s):  
Nirmal Kumar ◽  
Stanislav Haviar ◽  
Jiří Rezek ◽  
Jiří Čapek ◽  
Pavel Baroch
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Tungsten Oxide ◽  
Gas Sensor ◽  
Rf Sputtering ◽  
Hydrogen Gas ◽  
Deposition Parameters ◽  
Copper Tungstate ◽  
The Individual ◽  
Wo3 Thin Films

In this study, we demonstrate the advantages of two advanced sputtering techniques for the preparation of a thin-film conductometric gas sensor. We combined tungsten oxide (WO3) thin films with other materials to achieve enhanced sensorial behavior towards hydrogen. Thin films of WO3 were prepared using the DC and HiPIMS technique, which allowed us to tune the phase composition and crystallinity of the oxide by changing the deposition parameters. The second material was then added on-top of these films. We used the copper tungstate CuWO4 in the form of nano-islands deposited by reactive rf sputtering and Pd particles formed during conventional dc sputtering. The specimens were tested for their response to a time-varied hydrogen concentration in synthetic air at various temperatures. The sensitivity and response time were evaluated. The performance of the individual films is presented as well as the details of the synthesis. Advanced magnetron techniques (such as HiPIMS) allowed us to tune the property of the film to improve its sensorial behavior. The method is compatible with the silicon electronics industry and consists of a few steps that do not require any wet technique, and the films can be used in an as-deposited state. Therefore, sensorial nanostructured materials prepared using magnetron sputtering are very suitable for use in miniaturized electronic devices.

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