Atomic force microscopy investigation of the effects of annealing on amorphous carbon nitride films deposited by r.f. magnetron sputtering

1999 ◽  
Vol 8 (6) ◽  
pp. 993-995 ◽  
Author(s):  
R Prioli ◽  
S.I Zanette ◽  
A.O Caride ◽  
M.M Lacerda ◽  
F.L Freire
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