Atomic force microscopy investigation of the effects of annealing on amorphous carbon nitride films deposited by r.f. magnetron sputtering
1999 ◽
Vol 8
(6)
◽
pp. 993-995
◽
2001 ◽
Vol 8
(5)
◽
pp. 343-347
◽
1996 ◽
Vol 24
(8)
◽
pp. 503-510
◽
1999 ◽
Vol 198-199
◽
pp. 258-263
◽
2017 ◽
Vol 52
(4)
◽
pp. 1700021
◽
2012 ◽
pp. 1019-1025
2020 ◽
Vol 124
(28)
◽
pp. 5872-5883
2011 ◽
Vol 360
(1)
◽
pp. 52-60
◽