Energy-Dispersive Spectroscopy in A 400Kv Electron Microscope

Author(s):  
S. Suzuki ◽  
Y. Bando ◽  
H. Kitajima ◽  
T. Honda ◽  
Y. Harada ◽  
...  

A Si(Li) detector for X-ray energy dispersive spectroscopy (EDS) has been installed on a 400 kV EM, the JEM-4000EX, which is also interfaced with a scanning device (ASID40) and electron energy loss spectrometer (ASEA40). The EM's basic performance, i.e., resolving power, is 0.23 nm at 400 kV. X-ray microanalysis in a high-voltage EM has many advantages, but few reports have been published because of some severe instrumental problems originating from it's high energy electron beam. To overcome these problems many modifications have been made on the EM column.The modifications are divided into two aspects. One is the reduction of bremsstrahlung and the other is the protection of the Si(Li) detector from hard X-ray radiation from the upper parts of the detector, especially condenser lens (CL) aperture. To reduce bremsstrahlung many parts of the wall which electron beam might hit are covered with graphite and the materials for CL fixed apertures are changed to light elements. To protect the detector X-ray shielding parts made of heavy metals (W, Ta, Pb) and with a total thickness of more than 30 mm are set between the CL aperture and the Si(Li) detector.

1989 ◽  
Vol 163 ◽  
Author(s):  
Yoshihisa Fujisaki ◽  
Shigeo Goto

AbstractSurface structure of (NH4)2S treated GaAs. is investigated using PL (PhotoLuminescence), XPS (X-ray Photoelectron Spectroscopy) and RHEED (Reflection of High Energy Electron beam Diffraction). The data taken with these techniques show the strong dependence upon the crystal orientations coming from the stabilities of chemical bonds of Ga-S and As-S on GaAs crystals. The greater enhancement of PL intensity, the clearer RHEED patterns and the smaller amount of oxides on (111)A than (111)B implies the realization of a more stable structure composed mainly of the Ga-S chemical bond.


Author(s):  
T. K. Chatterjee ◽  
J. A. Spadaro ◽  
R. W. Vook

Matricardi et al. have shown that high energy electron diffraction patterns of unstained and unfixed catalase may be obtained with a high voltage TEM using a hydration stage and that without such a stage TED patterns could not be obtained. They showed that such patterns were observed only when the water vapor pressure in the vicinity of the catalase was greater than 90 percent of the equilibrium value. They attributed their results to the destruction of the crystallinity of catalase when it is vacuum dried. Similar results using X-ray diffraction techniques have been reported. Matricardi et al. also noted effects due to radiation damage, whereby the number of reflections observed using the hydration stage decreased substantially with electron beam exposure. In the present preliminary report, it is shown that electron diffraction patterns can be obtained from unstained and unfixed catalase even when the crystals are exposed directly to the vacuum of the TEM but under such conditions whereby the electron beam intensity is reduced by up to approximately two orders of magnitude from that usually obtained in normal TED work on a TEM.


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